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SUSS Respect 600 Automatic Photoresist Coater

Asset #: 20113

Make: SUSS

Model: Respect 600

Wafer Sizes: 6 inch

Last Confirm Date: April 18, 2017

SUSS Respect 600 Automatic Photoresist Coater, 6"
- Programmable controller
- PC with windows NT and applications program
- Touch screen
- RS 232 Interface
- Vacuum monitoring
- Edge bead removal
- Hotplate with vapor prime process
- Programmable outlets
- External process gas connection
- External cabinet exhaust connection
- Automatic exhaust control
- Media control panel
- Step up transformer: 208 to 400 V, 3 phase

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