{"product_id":"20100","title":"NEXX Cirrus 300 CVD (Chemical Vapor Deposition)","description":"NEXX Cirrus 300 CVD (Chemical Vapor Deposition)\u003cbr\u003e- Using ECR Technology. Formerly PlasmaQuest Astex\u003cbr\u003e- Low Temperature\u003cbr\u003e- PQ2000 Series permanent magnet low profile ECR source.\u003cbr\u003e- ASTeX AX2110 microwave power supply with remote magnetron head.\u003cbr\u003e- Output 150 - 1000 Watt, PC controlled\u003cbr\u003e- 20 inch outer diameter reactor chamber with Viton seals.\u003cbr\u003e- Six (6) MKS Instruments 2179A Kalrez sealed mass flow controllers, expandable to seven\u003cbr\u003e2000 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44812549980350,"sku":"20100","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/20100","provider":"Bridge Tronic Global","version":"1.0","type":"link"}