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Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)
Veeco RF 350 S Ion Beam Etcher (IBE)

Veeco RF 350 S Ion Beam Etcher (IBE)

Asset #: 17569

Make: Veeco

Model: RF 350 S

Veeco RF 350 S Ion Beam Etcher (IBE)
Voltage A.C.: 400 Vac
HZ: 50
F.L. Amps: 100
A.I.C. Amps: 10000
Motor H.P.: 5
Process: IBE & CAIBE
Load Station: 6"
End Point Detection: Optical Emission & Scanview
Turbo Kammer: MAG2000
RF-Generator: RFPP, RF20M 2kW Plus 1 Spare
Gas Lines: Ar, N2, He
1 Spare Grid
Manuals
2000 Vintage

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