{"product_id":"16885","title":"Plasmatherm VLR 700 VLR-PM 1-ICRB-PM PECVD (Plasma-Enhanced Chemical Vapor Deposition)","description":"Plasmatherm VLR 700 VLR-PM 1-ICRB-PM PECVD (Plasma-Enhanced Chemical Vapor Deposition), 2\" to 8\"\u003cbr\u003e- Single Chamber \u003cbr\u003e- Mixed Frequency Deposition \u003cbr\u003e(MFD) Both High Frequency (13.56 MHz) and Low Frequency (50-460 kHz)\u003cbr\u003e- RF power delivered both electrodes\u003cbr\u003e- Nitride Depostion \u003cbr\u003e- Water Cooled\u003cbr\u003e- Chamber 1: 13.5\" Electrode\u003cbr\u003eGas Delivery Six Channel; (2)2000 sccm, (2)1000 sccm, (1)200 sccm, (1)20 sccm\u003cbr\u003e- Accessories: Leybold Pump Package\u003cbr\u003eNeslab HX 75 Chiller\u003cbr\u003e- Computer #1 dual boot VxWorks Wind River Systems 5.3.1 BSP version 1.1\/1 and\u003cbr\u003eWindows 3.11 System Monitor VLR v.1.10 \u003cbr\u003e- Computer #2 NT4, Versaworks 2.5\u003cbr\u003e1999 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44812484640958,"sku":"16885","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/16885","provider":"Bridge Tronic Global","version":"1.0","type":"link"}