{"product_id":"16882","title":"Plasmatherm 790 RIE-PECVD (Reactive Ion Etcher - Plasma-Enhanced Chemical Vapor Deposition)","description":"Plasmatherm 790 RIE-PECVD (Reactive Ion Etcher - Plasma-Enhanced Chemical Vapor Deposition)\u003cbr\u003e- Refurbished PECVD System with 11\" Electrode \u003cbr\u003e-Single Chamber\u003cbr\u003e- Generator: RFPP 5S\u003cbr\u003e- Process gasses: SF6, Ammonia, Nitrogen \u003cbr\u003e- Power Requirements: 208 V 60 Hz 3 Phase \u003cbr\u003e- Dimensions: Width 24.000 in (61.0 cm) \/ Depth 40.000 in (101.6 cm) \/ Height 69.000 in (175.3 cm) \/ Weight 604 lb (274 kg)\u003cbr\u003e- Resistive heated lower electrode up to 350 C watlow temperature controller\u003cbr\u003e- Cooling\/heating circuit in chamber walls\u003cbr\u003e- MKS throttle valve pressure control\u003cbr\u003e- VAT Al body gate valve assembly--ISO 100\u003cbr\u003e- 2 torr manometer\u003cbr\u003e- Windows 98 Operating System\u003cbr\u003e- Process Gases--All MFCs will be cleaned and calibrated to NIST standards:\u003cbr\u003e2-N2 500sccm \u003cbr\u003e2-N2 1000sccm \u003cbr\u003e1-SF6 50sccm \u003cbr\u003e1-Ammonia 20sccm\u003cbr\u003e- Operating manuals and related documentation included.\u003cbr\u003e- Vacuum pump and chiller are not included.\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e1998 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44812484509886,"sku":"16882","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/16882","provider":"Bridge Tronic Global","version":"1.0","type":"link"}