{"product_id":"16879","title":"NEXX Cirrus 300 CVD (Chemical Vapor Deposition)","description":"NEXX Cirrus 300 CVD (Chemical Vapor Deposition), 2\" to 12\"\u003cbr\u003e-  with ECR source\u003cbr\u003e- Low Temperature CVD Using ECR Technology\u003cbr\u003e- High vacuum pump - Balzers TMH 1001 corrosive service Turbo \u003cbr\u003e- Chiller - Neslab HX 75\u003cbr\u003e- PQ2000 Series permanent magnet low profile ECR source.\u003cbr\u003e- ASTeX AX2110 microwave power supply with remote magnetron head\u003cbr\u003e- 20 inch outer diameter reactor chamber with Viton seals\u003cbr\u003e- Six (6) MKS Instruments 2179A Kalrez sealed mass flow controllers, expandable to seven\u003cbr\u003e- Operating air pressure 80.00 PSI (551,624.00 N\/sq m)\u003cbr\u003eDimensions - W 81.000 in (205.7 cm) \/ Depth 41.000 in (104.1 cm) \/ Height 85.000 in (215.9 cm)\u003cbr\u003e2000 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44812484411582,"sku":"16879","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/16879","provider":"Bridge Tronic Global","version":"1.0","type":"link"}