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Rigaku SmartLab XRD (X-ray Diffractometer)

Asset #: 159882

Make: Rigaku

Model: SmartLab

Wafer Sizes: 6 inch

Last Confirm Date: November 10, 2026

Rigaku SmartLab XRD (X-ray Diffractometer), 6"
Sample Types:
- Epitaxial thin films
- Polycristalline thin films
- Powders
Measurements:
- Rocking curves and omega/2theta measurement of epitaxial films
- Crystal orientation/off-cut
- Stresses/strain of single crystal thin film
- High-speed wide angle x-ray diffraction
- Fast mode reciprocal space mapping
- Using HyPix-3000 hybrid Pixel array detector
- Density and film thickness determination (x-ray reflectivity XRR)
- Pole figures
- Low angle measurement as low as 0.1 °
- In-plane measurements
Accessories:
- Parallel or divergent beam selection using a simple slit
- Motorized optics alignment
- Motorized slits
- Incident beam Ge 4x 220 monochromator
- Diffracted beam Ge2x 220 monochromator
- Solar slits for both out of plane and in-plane measurements

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