{"product_id":"159867","title":"Apsytec ApSy P 100 Magnetron Sputter","description":"Apsytec ApSy P 100 Magnetron Sputter\u003cbr\u003e- Front-Loading High-Vacuum Process Chamber\u003cbr\u003e- 304L Stainless Steel Chamber\u003cbr\u003e- Chamber Viewing Window\u003cbr\u003e- Replaceable Internal Shields\u003cbr\u003e- ISO-KF Expansion Ports\u003cbr\u003e- (4) Independently Controlled 2\" Confocal Magnetron Sources\u003cbr\u003e- Multi-Target Co-Deposition Capability\u003cbr\u003e- Individual Source Shutters\u003cbr\u003e- Individual Gas Injection\u003cbr\u003e- (2) RF Generators\u003cbr\u003e- COMET SYNERTIA RF Generators\u003cbr\u003e- RF Frequency: 13.56 MHz\u003cbr\u003e- RF Power: 1,500 W Each\u003cbr\u003e- RF Matching Networks\u003cbr\u003e- (2) DC Generators\u003cbr\u003e- DC Power: 2 kW Each\u003cbr\u003e- Heated Rotating Substrate Holder\u003cbr\u003e- Substrate Size: Up to 4\"\u003cbr\u003e- Substrate Heating: Up to 800°C Design Capability\u003cbr\u003e- Customer Requirement Covered to 600°C\u003cbr\u003e- Reference Rotation Speed: Up to 20 RPM\u003cbr\u003e- Metallic, Semiconductor \u0026amp; Dielectric Film Deposition\u003cbr\u003e- Argon \/ Nitrogen Gas Control\u003cbr\u003e- Mass Flow Controllers\u003cbr\u003e- BARATRON-Type Capacitive Pressure Gauge\u003cbr\u003e- Design Base Pressure: \u0026lt;1 × 10⁻⁷ mbar\u003cbr\u003e- Edwards STP-iS2207 Turbomolecular Pump\u003cbr\u003e- Turbo Pumping Speed: 1,850 L\/sec N₂\u003cbr\u003e- Edwards nXR40i Dry Backing Pump\u003cbr\u003e- Dry Pumping Speed: 40 m³\/hr @ 50 Hz\u003cbr\u003e- VAT DN200 Pneumatic Gate Valve\u003cbr\u003e- MKS 974B Combination Vacuum Gauge\u003cbr\u003e- MicroPirani Backing-Line Sensors\u003cbr\u003e- SMC Pneumatic Venting Valves\u003cbr\u003e- SMC Solenoid Valves \u0026amp; Pneumatic Manifold\u003cbr\u003e- Source \/ RF Matching Network Cooling\u003cbr\u003e- Siemens Industrial PLC\u003cbr\u003e- 19\" Siemens Touchscreen\u003cbr\u003e- Automated Process Control\u003cbr\u003e- Recipe Management\u003cbr\u003e- Manual \/ Automatic Operating Modes\u003cbr\u003e- Alarm History \u0026amp; Data Export\u003cbr\u003e- Status Light Tower\u003cbr\u003e- Control UPS\u003cbr\u003e- Power: 400 V, 3-Phase + Neutral + Ground\u003cbr\u003e- Protection: 63 A\u003cbr\u003e- Compressed Air: 6 bar\u003cbr\u003e- Cooling Water: 1,500 L\/hr @ 4–5 bar\u003cbr\u003e- Argon \/ Nitrogen Supply: 2 bar\u003cbr\u003e- Door \u0026amp; Power-Supply Interlocks\u003cbr\u003e- Emergency Stop\u003cbr\u003e- Utility \u0026amp; Fault Monitoring","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":49631586386110,"sku":"159867","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/Picture1_19dee962-4323-4ae0-b587-9bee74b37ada.jpg?v=1794356240","url":"https:\/\/www.bridgetronic.com\/products\/159867","provider":"Bridge Tronic Global","version":"1.0","type":"link"}