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Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)
Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)

Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher)

Asset #: 158545

Make: Entrepix

Model: DSS 200

Wafer Sizes: 4, 6, 8 inch

Last Confirm Date: September 21, 2026

Entrepix DSS 200 Post CMP Scrubber (Chemical Mechanical Polisher), 4", 6", 8"
- Double Side Scrubber
- Through the brush chemical dispense in each brush box
- I/O addressing
- Upgraded drive and stepper motor controls
- Windows 7 O/S
- Color Touch Screen Flat Panel Display
- Process parameter flexibility is maintained in a controlled and repeatable manner through system software
- Factory Mutual FM4910 approved plastics utilized for major assemblies
- Molded Spin Sink (SRD)
- Improved DI\Chemical Dispense Module.
- 5-Finger Wafer Gripper Standard
- Universal Lifter Tip / 100-200mm, 600,800,1000,1200 Micron thickness options
- Consistent w/ Legacy consumables
220VAC UL Listed
- CE marked electrical enclosure
2022 Vintage

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