Skip to content
Skip to product content
Lam / SEZ SP 203 Spin Etcher
Lam / SEZ SP 203 Spin Etcher
Lam / SEZ SP 203 Spin Etcher
Lam / SEZ SP 203 Spin Etcher
Lam / SEZ SP 203 Spin Etcher
Lam / SEZ SP 203 Spin Etcher
Lam / SEZ SP 203 Spin Etcher

Lam / SEZ SP 203 Spin Etcher

Asset #: 158245

Make: Lam / SEZ

Model: SP 203

Wafer Sizes: 6 inch

Last Confirm Date: September 08, 2026

Lam / SEZ SP 203 Spin Etcher, 6"
- Power: 400V, 50 Hz, 3-Phase
- Configured for 3" Substrates
- MAG900CT Turbopump
- Power Distribution & Control Rack Cabinet
- Electrogrip Electrostatic Driver
- VAT PM-7 Adaptive Pressure Controller
- Leybold MAG Drive 1000 Pump Controller
- ENI ACG-10B RF Generator
- ENI ACG-3B-06 RF Generator
- ENI VL-400 Phase Shift Controller
- PowerBright VC-2000 Step-Up/Down Transformer
- BOC Edwards iQDP-80 Roughing Pump
- Roughing Pump Code: A532-80-905
- Neslab RTE-211 Recirculating Chiller
- Gas Cabinet
- LEP300 Control Server
- 6-Inch Bernoulli handling with Pinless chuck (with centering pins)
- Includes 3 Chemistry Cabinets
1999 Vintage

Recommended Products


Equipment Sourcing:

Unmatched Expertise in Global Procurement

See More of Our Equipment

At Bridge Tronic Global, we leverage our extensive network and industry expertise to source high-quality semiconductor manufacturing equipment from trusted suppliers worldwide. Whether you're looking for cutting-edge technology or reliable pre-owned equipment, our sourcing capabilities ensure that you receive the best options tailored to your needs.

We understand that every client's requirements are unique, so we prioritize transparency, thorough vetting, and a deep understanding of the global market to secure the right equipment for your operations. Our team is dedicated to delivering timely, cost-effective solutions without compromising on quality or performance.


Wafer test machine

Refurbishment: Restoring Excellence, Maximizing Value

At Bridge Tronic Global, our refurbishment services breathe new life into used semiconductor manufacturing equipment, ensuring peak performance at a fraction of the cost. Our expert technicians meticulously restore equipment from leading brands like KLA and Hitachi, applying rigorous testing and quality control measures. Whether you need a single piece refurbished or a fleet of equipment overhauled, we deliver reliable, high-performing solutions that extend the lifespan of your assets while optimizing your budget.

Cart

Your cart is currently empty