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Veeco Spector Ion Beam Deposition (IBD)

Asset #: 15801

Make: Veeco

Model: Spector

Last Confirm Date: March 03, 2017

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Veeco Spector Ion Beam Deposition (IBD)
- Currently Coating Nb, Ta, Hf, SiO2, Si and Al2O3
- Running band pass filters and high reflection mirrors
- Two guns: 16cm and 12cm regular Veeco Ion Tech ion sources
- Three targets: 14in diameter, Nb, SiO2 and SiO2
- This has a high speed motor on the system. But we have another original Veeco Ion Tech made planetary system that we can include with additional cost
- The system configured with an optical monitor for Telecommunication application. Wavelength coverage is 1520-1600nm. We have only been using the system for general optics coating, we haven’t used this IR optical monitor for a long time. So the system does have all the IR optical monitor but we are not using it.
- The system has been used as power and time mode, therefore, system does not have a Quartz control but we can add one with additional cost.
- Roughing pump, either Leybold 65C, or Edward for mechanical pump, and cryopump, CTI 400 cryogenics
- We can include a load lock chamber with additional cost

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