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Leybold Syrus Pro 1100 Evaporator
Leybold Syrus Pro 1100 Evaporator
Leybold Syrus Pro 1100 Evaporator
Leybold Syrus Pro 1100 Evaporator

Leybold Syrus Pro 1100 Evaporator

Asset #: 157585

Make: Leybold

Model: Syrus Pro 1100

Last Confirm Date: August 19, 2026

Leybold Syrus Pro 1100 Evaporator
Scope of Supply:
- Water cooled shields
- Polycold PFC 1102 HC CE and Meissner
- Cryo Pump Set Coolvac 10.000 iCL
- Prevacuum Pump Set for Cryopump COBRA DP 250A
- 2x Process Gas with Pressure Control
- 6 fold planetary with tilting devices
- 3 x pairs ceramic heater (front side) 5,2 KW
- Pyrometer to measure substrate temperature
- Advanced Plasma Source APSpro
- 2 x Electron Beam Evaporator HPE 6 (Crucible 3-Pocket for HPE 6 (directly water-cooled and Crucible 4-Pocket for HPE 6 (indirectly water-cooled))
- 2 x Twin Thermal Evaporator (2 sources, water cooled)
- 1 x Single Thermal Evaporator (1 sources, water cooled)
- 2 x XMS Single Quartz Crystal Sensor Head
- OMS 5000 Process Photometer for VIS-NIR (400-2200 nm)
- Combined Sensor Head T12/Q4 (OMS4000/XMS)
Upgrades Installed:
- PC APS heater power supply upgraded 2/8/24

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