ONTO / Nanometrics RPMBlue Photoluminescence Mapping System, up to 6"
- Automatic Wafer Loader - Wafer Size: 2", 4" & 6" (Up to 150 mm) - Maximum Wafer Thickness: 1 mm - Industry Standard Genmark Robot & Pre-Aligner - High-Speed R-Theta Wafer Stage - Vacuum Wafer Hold-Down - Stage Rotation Speed: Up to 81 RPM - Scan Resolution: Up to 0.1 mm - Measurement Speed: Up to 2,000 Points/Second - Measurement Wavelength Range: 405–1700 nm - Excitation Sources: 405 nm, 532 nm & 980 nm - White Light Excitation Source - Spectral Measurement Option - Integrated PL Intensity Mapping - Peak Wavelength Mapping - Peak Intensity Mapping - Full-Width at Half Maximum (FWHM) Mapping - PL Wavelength Resolution: ≤0.3 nm - Peak Wavelength Reproducibility: <1 nm - White Light Thickness Measurement - Thickness Measurement Accuracy: Better Than 1% - Thickness Measurement Precision / Reproducibility: ≤1% or <10 nm - VCSEL Structure Analysis Capability - Fixed Spectrometer Entrance Slit - Automatic Recipe-Based Wafer Processing - Automatic Cassette-to-Inspection Wafer Handling - 670 nm Laser Pre-Aligner - Cleanroom Compatible