{"product_id":"157186","title":"SCIA Trim 200 Ion Beam Trimmer","description":"SCIA Trim 200 Ion Beam Trimmer, 4\", 6\"\u003cbr\u003e- Vacuum chamber with pumps (excluding roughing pump)\u003cbr\u003e- Trimming arrangement with focused ion beam source, neutralizer \u0026amp; 4 axis\u003cbr\u003e- Wafer chuck with mechanical wafer clamping \u0026amp; helium backside thermal contact\u003cbr\u003e- Facility supply including 3 gas channels, compressed air and cooling water distribution\u003cbr\u003e- Handling robot with cassette loading, vacuum pre-aligner and wafer-ID reader \u003cbr\u003e- Control rack with electricity power supply and control PC\u003cbr\u003e- SECS\/GEM Interface for system software \u003cbr\u003e- RGA Integration \u003cbr\u003e- Additional gas channel\u003cbr\u003e- Handling unit upgrade to MX500 with 2 load locks\u003cbr\u003e- Process chamber\u003cbr\u003e- Brooks MX 400 handling robot \u003cbr\u003e- Axis systems (X,Y,Z, \u0026amp; phi Axis)\u003cbr\u003e- SECS II according to SEMI E 5-0706 standard\u003cbr\u003e- GEM according to SEMI E 30-1103 standard\u003cbr\u003e- Lower level protocols HSMS-SS according to SEMI E 37-0303 standard\u003cbr\u003e- RGA MKS HPQ3S for process monitoring\u003cbr\u003e- Software, power supply, graneville phillips micro gauge \u003cbr\u003e- RGA integration for early leak detection \u003cbr\u003e- Integration of MKS instruments HPQ3S IP RGA to Ion beam trimming tool process chamber and into control software\u003cbr\u003e- RGA measurements active in stand-by as well as during processing\u003cbr\u003e- MKS Instruments HPQ3S IP RGA including wiring \u003cbr\u003e- Software controlled angle valve between process chamber and RGA to protect filament during pressure increase\u003cbr\u003e- Full integration into control software\u003cbr\u003e- Connection of RGA via ethernet\u003cbr\u003e- Manual control of RGA to start measurement for selected masses\u003cbr\u003e- Visual output of measurement\u003cbr\u003e- Alarm threshold \u0026amp; tolerance time for 14 individual masses, averaging over defined time period possible\u003cbr\u003e- Logging of up to 14 different masses in online \u0026amp; off-line trend\u003cbr\u003e- Integration of relevant information into production log\u003cbr\u003e- Automatic start of measurement with process start (when wafer is on chuck), to be switched on \u0026amp; off in general recipe parameters (not selectable for individual recipes)\u003cbr\u003e- SECS\/GEM Integration of the selected masses \u0026amp; current status\u003cbr\u003e- 7 additional gas channel, inert, 1\/4\"\u003cbr\u003e- 1 mass flow controller (MKS) with 2 bellow sealed pneumatically operated valves \u003cbr\u003e- Gas piping in 1\/4\" stainless steep with VCR fittings\u003cbr\u003e- Gas cabinet in system frame\u003cbr\u003e- complete software \u0026amp; hardware integration \u003cbr\u003e- Handling unit upgrade to MX 500 with 2 load locks\u003cbr\u003e- Handling platform Brooks MX 500 with 2 cassette load-locks instead of MX 400 with 1 load-lock\u003cbr\u003e- Wafer loading over 2 cassette load-locks in order to reduce pump down time after wafer cassette exchange\u003cbr\u003e2015 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":48568201937086,"sku":"157186","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/5_5bd50a4f-d7e7-478f-819f-2916cf0dddce.jpg?v=1786059421","url":"https:\/\/www.bridgetronic.com\/products\/157186","provider":"Bridge Tronic Global","version":"1.0","type":"link"}