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Lam / SEZ SP 304
Lam / SEZ SP 304
Lam / SEZ SP 304

Lam / SEZ SP 304

Asset #: 155889

Make: Lam / SEZ

Model: SP 304

Wafer Sizes: 8 inch

Last Confirm Date: June 30, 2026

Lam / SEZ SP 304 , 8"
Equipped With:
- 8-inch Bernoulli handling
- Frontside and Backside (implemented by PTW) with Pinlesschuck and Pinchuck
- Cold DI in Nozzle
- Hot DI in Dispenser
- Exhaust up
- Heat exchangers
- 1x double hex with Lauda for Di
- 1x double hex with Lauda for Medium 2
- 1x single hex with Lauda for Medium 1 (not used)
- 1x single hex with Lauda for Medium 3
Chemistry:
- 2 Cabinets with Maintank & Buffertank
- Mixtank with 3 paddle wheels
- Pressure regulator for facility lines
- Drain pump station
Problems:
- Chemistry cabinets are used
- Some parts in the tool are corroded
- Tool has been repaired and converted to Bernoulli handling
- Software adjustments have been made
2002 Vintage

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