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Lam Alliance A 6 TCP 9400 DFM Polysilicon Etch
Lam Alliance A 6 TCP 9400 DFM Polysilicon Etch
Lam Alliance A 6 TCP 9400 DFM Polysilicon Etch
Lam Alliance A 6 TCP 9400 DFM Polysilicon Etch
Lam Alliance A 6 TCP 9400 DFM Polysilicon Etch
Lam Alliance A 6 TCP 9400 DFM Polysilicon Etch
Lam Alliance A 6 TCP 9400 DFM Polysilicon Etch
Lam Alliance A 6 TCP 9400 DFM Polysilicon Etch
Lam Alliance A 6 TCP 9400 DFM Polysilicon Etch

Lam Alliance A 6 TCP 9400 DFM Polysilicon Etch

Asset #: 153146

Make: Lam

Model: Alliance A 6 TCP 9400 DFM

Wafer Sizes: 8 inch

Last Confirm Date: April 15, 2026

Lam Alliance A 6 TCP 9400 DFM Polysilicon Etch, 8"
- Transport Module: TCP 9400 FM-P Modules for Tungsten Silicide Etch
- Software: A4.0-37VM
- PM4: TCP 9400D FM-P, Wsix Etch
- ESC: Anodized Aluminum
- Interferometer EP: PM4
- Enhanced Universal Gas Box (12 sticks)
PM4 Gas Box:
- Brooks GF 125 (10)
- Brooks Automation Mag 7
Dry Pumps:
- Busch DS 80 Cobra
- Busch BA 100 (2)
Chillers:
- TCU: Edwards 40/80 Plus
- RPM: Voltage SAG Enhanced
2015 Vintage

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