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Applied Materials / Varian E 500 EHPI Medium Current Implanter
Applied Materials / Varian E 500 EHPI Medium Current Implanter
Applied Materials / Varian E 500 EHPI Medium Current Implanter
Applied Materials / Varian E 500 EHPI Medium Current Implanter
Applied Materials / Varian E 500 EHPI Medium Current Implanter
Applied Materials / Varian E 500 EHPI Medium Current Implanter
Applied Materials / Varian E 500 EHPI Medium Current Implanter
Applied Materials / Varian E 500 EHPI Medium Current Implanter

Applied Materials / Varian E 500 EHPI Medium Current Implanter

Asset #: 152808

Make: Applied Materials / Varian

Model: E 500 EHPI

Wafer Sizes: 6 inch

Last Confirm Date: April 14, 2026

Applied Materials / Varian E 500 EHPI Medium Current Implanter, 6"
- Loading Configuration: Open Cassette
- Software: V 13.30 rev D
- Floppy Drive Type: 3.5"
- CE Mark
- All cables present
- GEM/SECS
- SECS II Interface
- Energy Range: 10 KeV - 200 KeV
- Fast Cryo Regen
- Solid State Scanner: 30 KV
- Roplat Tilter
- Roplat Dual Motor
- Gas Box Type: HP
- Computer Type: Pentium
- Cooled Platen
- OnBoard Cryos
- SDS
- Signal Tower
- Beam Energy Probe
- Beam Purity Check Software
- Fast Parametric Software
- Hall Probe
- Reverting Source Magnet
- 15 amp Arc Power Supply
- EHP Beam Current
- EHP Source Bushing
- EHP Metals Kit
- 10" Target Cryo
- Load Lock Turbos (EHP)
- Load Lock Turbo: V 300 HT
- Cassette Present Sensor
- Cooled Setup Faraday
- Faraday Limit Sensor
- Exhaust Leak Detector
- Source Zone Turbo Pump: STP 1000
- Scanner Turbo Pump: STP 1000
- Analyzer Turbo Pump: V 300 HT
- CTI 9600 Cryo Compressors
- Vacuum Pumps (3): Edwards QDP 80, QMB 250
- Pump Type: Dry
- No Standard Network Communication Capability
- No Calibration Standards
- Remote Service Monitor
- Narrow Service Monitor Cart
- No UPS
- No Auto Decel
- No rotating Platen
- No Two Stage Beam Reducer
- No Cryo N2 Heater
- No Cassette Interlock Upgrade
- Wafer Position Detect
- No ICON
- No Grounding Rod Upgrade Kit
- No CPI Power Supply Upgrade
- No Ground Fault Detector
- No Beamline Turbo Pump
1996 Vintage

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