{"product_id":"152305","title":"Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)","description":"Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)\u003cbr\u003e- Dry pump: Edwards QDP 40\u003cbr\u003e- System Control: HP PC System, Windows XP\u003cbr\u003e- 208 VAC, 3 Phase\u003cbr\u003e- Full Load: 25 A\u003cbr\u003eGas Box:\u003cbr\u003e- Gas 1: MKS 1479 A, 5% SiH4 \/ N2, 1000 SCCM\u003cbr\u003e- Gas 2: MKS 1479 A, NH3, 100 SCCM\u003cbr\u003e- Gas 3: MKS 1179 A, N2, 2000 SCCM\u003cbr\u003e- Gas 4: MKS 1179 A, N2O, 3000 SCCM\u003cbr\u003e- Gas 5: MKS 1179 A, ,O2, 300 SCCM\u003cbr\u003e- Gas 6: MKS 1179 A, Ar, 500 SCCM (TEOS carrier gas)\u003cbr\u003e- TEOS Thermotank: Thermocenter salvis lab\u003cbr\u003eChamber:\u003cbr\u003e-  Chuck: φ202 mm（ φ2’, φ4’, φ6’, φ8’）\u003cbr\u003e- Shower head: φ225 mm\u003cbr\u003eRF System:\u003cbr\u003e- RF Generator: AE RFX 600 A\u003cbr\u003e- Match Box: OPT AMU Oxford\u003cbr\u003e- LF Generator: AE LF-5\u003cbr\u003e- Match Box: Manual Transfor UP\u003cbr\u003ePressure Control:\u003cbr\u003e- Valve: VAT 12036-PA 4\u003cbr\u003e- MKS valve control: 253 B\u003cbr\u003eTurbo Pump:\u003cbr\u003e- Alcitel ACT 200 T Control Unit\u003cbr\u003e- Alcitel ATP 80\/ 100 Turbo Pump\u003cbr\u003eLL Chamber:\u003cbr\u003e- φ2’, φ4’, φ6’, φ8’ single wafer auto transfer\u003cbr\u003e- Slit Valve:VAT 02110 BA 24 AQZ 1\u003cbr\u003e- Pirani Gauge: Edwards APG-L-NW 16\u003cbr\u003e- Vacuum Gauge: Edwards AIM-S-NW 25","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":46554829193406,"sku":"152305","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/Oxford_5_93acb84b-6ac2-488d-a630-96e75b116e09.jpg?v=1775164956","url":"https:\/\/www.bridgetronic.com\/products\/152305","provider":"Bridge Tronic Global","version":"1.0","type":"link"}