{"product_id":"152304","title":"SUSS MA 8 \/ BA 8 Mask Aligner","description":"SUSS MA 8 \/ BA 8 Mask Aligner\u003cbr\u003e- Backside Optical Alignment\u003cbr\u003e- Wafer Loading: Manual loading \u0026amp; unloading\u003cbr\u003e- Air floating optical table\u003cbr\u003eMicroscope System:\u003cbr\u003e- Equipped with 2 sets of left \u0026amp; right microscopes\u003cbr\u003e- Microscopes include a 3-axis automatic movement stage\u003cbr\u003e- Manual focus adjustment function\u003cbr\u003e- High definition \u0026amp; resolution industrial  camera\u003cbr\u003e- Microscope Lenses: 2× 5× lenses, 2× 10× lenses\u003cbr\u003eOptical System:\u003cbr\u003e- 1000 W UV mercury lamp\u003cbr\u003e- UV 400 optical path system\u003cbr\u003e- Light source position can be manually adjusted\u003cbr\u003eAlignment System:\u003cbr\u003e- Equipped with a dedicated mask holder; Manual mask loading \/ unloading\u003cbr\u003e- High precision micrometer for wafer alignment adjustment\u003cbr\u003e- Micrometer axes: X \/ Y \/ θ (theta)\u003cbr\u003e- X \/ Y minimal travel: 10 mm\u003cbr\u003e- θ-axis maximum rotation angle: ±5°\u003cbr\u003eExposure Modes:\u003cbr\u003e- Proximity\u003cbr\u003e- Soft contact\u003cbr\u003e- Hard contact\u003cbr\u003eMain Mechanical Parameters: \u003cbr\u003e- Mercury lamp intensity: 12 mW\/cm²\r- Proximity (20 μm): 2.5 μm resolution\r- Exposure Modes: Contact (soft, hard), proximity\rExposure Optics\r- Resolution: down to 0.8 μm\r- Wavelength range: UV400 (350–450 nm)\r- Intensity uniformity: ±5%\u003cbr\u003eAlignment Methods:\r- TSA accuracy: down to 0.5 μm\rAlignment Stage:\r- Movement range\rX: ±10 mm\rY: ±5 mm\rθ: ±5°\r- Mechanical accuracy: 0.1 μm (step size)\r- Exposure area: ≥ 200 mm diameter\u003cbr\u003eUtility Requirements\r- Vacuum: \u0026lt; -0.8 bar\r- Compressed air: 5–7 bar\r- Nitrogen: 2–3 bar\r- Power supply: 200–240 V, 3 kVA","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":46554769817790,"sku":"152304","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/SUSS_1_c6e3a9f1-b793-4361-a5ba-74530791da93.jpg?v=1775161795","url":"https:\/\/www.bridgetronic.com\/products\/152304","provider":"Bridge Tronic Global","version":"1.0","type":"link"}