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Leybold IBS 1400 HT GT Dual Ion Beam Sputtering System
Leybold IBS 1400 HT GT Dual Ion Beam Sputtering System
Leybold IBS 1400 HT GT Dual Ion Beam Sputtering System
Leybold IBS 1400 HT GT Dual Ion Beam Sputtering System

Leybold IBS 1400 HT GT Dual Ion Beam Sputtering System

Asset #: 151738

Make: Leybold

Model: IBS 1400 HT GT

Last Confirm Date: March 18, 2026

Leybold IBS 1400 HT GT Dual Ion Beam Sputtering System
- 4 position target tower with 3 target positions (optional 4th target)
- Main KRI sputter source and additional KRI assist source
- OMS5100i direct optical monitor (as installed in the HELIOS)
- 4 x 35 0mm planetary substrate carrier (2 x 530 mm planets can also be installed)
- Two test glasses (with shutter) on the substrate carrier for complex process monitoring schemes
- Ceramic plate substrate heater
- Front and rear doors
2025 Vintage

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