{"product_id":"151333","title":"Applied Materials Mirra Mesa CMP (Chemical Mechanical Polisher)","description":"Applied Materials Mirra Mesa CMP (Chemical Mechanical Polisher)\u003cbr\u003e- CMP Model: Mirra Mesa\u003cbr\u003e- Process: OX\u003cbr\u003e- Polisher System Module: 4 Head 3 Platen\u003cbr\u003ePlaten 1 configuration: \u003cbr\u003e- Platen 1 Type: With window, belt + gear CVT\u003cbr\u003e- Platen 1 endpoint: Full scan and motor torque\u003cbr\u003e- Platen 1 slurry arm: Standard tunable\u003cbr\u003e- Platen 1 pad conditioner arm: Standard\u003cbr\u003ePlaten 2 configuration: \u003cbr\u003e- Platen 2 Type: With window, belt + gear CVT\u003cbr\u003e- Platen 2 endpoint: Full scan\u003cbr\u003e- Platen 2 slurry arm: Standard tunable\u003cbr\u003e- Platen 2 pad conditioner arm: Standard\u003cbr\u003ePlaten 3 configuration: \u003cbr\u003e- Platen 3 Type: With window, belt + gear CVT\u003cbr\u003e- Platen 3 endpoint: Full scan\u003cbr\u003e- Platen 3 slurry arm: Standard tunable\u003cbr\u003e- Platen 3 pad conditioner arm: Standard\u003cbr\u003e- Polishing head: 3 zone\u003cbr\u003e- Slurry Delivery: 2 types of slurry\u003cbr\u003e- Slurry Flow Rate control: Peristaltic pump\u003cbr\u003eFactory Interface Options: \u003cbr\u003e- FABs port: 3 Port\u003cbr\u003eFacilities Options\/System Safety Equipment: \u003cbr\u003e- EMO Guard Ring\u003cbr\u003e- Smoke Detector\u003cbr\u003eElectrical Requirements: \u003cbr\u003e- Line Frequency: 50\/60 HZ\u003cbr\u003e- Line Voltage: 200-230V\u003cbr\u003e- Connection: Three-phase four-wire\u003cbr\u003e- Power Lamp: Green Lamp\u003cbr\u003e- Power Connected Lamp\u003cbr\u003e- GFI Type: STANDARD 30mA\u003cbr\u003eCleaner Options\u003cbr\u003e- Cleaner Quantity: 1 unit\u003cbr\u003e- Cleaner Robot: working beam\u003cbr\u003eMegasonics Module\u003cbr\u003e- Cleaning Method: Vertical\u003cbr\u003e- Megasonics Delivery Type: 2 Chem flow meter type\u003cbr\u003eBrush 1 Module: \u003cbr\u003e- Cleaning Method: Vertical\u003cbr\u003e- Brush 1 clean: 1 Chem and DIW\u003cbr\u003e- Brush 1 flow Type: flow meter type\u003cbr\u003eBrush 2 Module\u003cbr\u003e- Cleaning Method: Vertical\u003cbr\u003e- Brush 2 clean: 1 Chem and DIW\u003cbr\u003e- Brush 2 flow rate: flow meter type\u003cbr\u003eDry Module\u003cbr\u003e- Dry Type: Spin Dryer\u003cbr\u003e- Lamp heater Drying\u003cbr\u003e- N2 Drying","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":46484224377022,"sku":"151333","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/151333","provider":"Bridge Tronic Global","version":"1.0","type":"link"}