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KLA Alpha Step D 600 Stylus Profiler
KLA Alpha Step D 600 Stylus Profiler
KLA Alpha Step D 600 Stylus Profiler
KLA Alpha Step D 600 Stylus Profiler
KLA Alpha Step D 600 Stylus Profiler
KLA Alpha Step D 600 Stylus Profiler

KLA Alpha Step D 600 Stylus Profiler

Asset #: 151278

Make: KLA

Model: Alpha Step D 600

KLA Alpha Step D 600 Stylus Profiler
Optical lever sensor head - Vertical range: 0 - 1.200 µm - Force range: 0,03 - 15 mg - Computer stylus force control - Stylus, 2um radius, 60° cone angle Motorized sample stage with 55 mm scan length - 200 mm diameter chuck with vacuum sample hold down - XY stage movement: 150 x 178 mm - Manual stage leveling - Enables 2D measurements Side view optics - 3.760 x 3.120 um FoV - 5 MP color digital camera - 4x digital zoom - Keystone correction for angled optics 1um und 50um step height standards Profiler 2D acquisition and surface analysis software PC configuration (minimum specifications): - Windows 7 Professional - 3.4 GHz Intel dual core processor - 2 GB RAM - 250 GB hard drive - 16x DVD+/-RW Drive - USB 2.0 (front and rear ports) and one Ethernet (RJ45) port - MS Office Business - 19-inch flat panel LCD monitor
Issue: Able to do scans, but the head is not working properly (not precise). The stylus does not have the expected freedom of movement
2016 Vintage

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