{"product_id":"150952","title":"Yes 1224 P CVD (Chemical Vapor Deposition)","description":"Yes 1224 P CVD (Chemical Vapor Deposition)\u003cbr\u003e- Part Number: 900-10580-01\u003cbr\u003e- Power Requirements: 208 VAC, 50\/60 Hz, Single Phase, 25 FL Amps\u003cbr\u003e- Clean Room Compatibility: Class 10\u003cbr\u003e- Chamber Material: 316L Stainless Steel\u003cbr\u003e- Chamber Size: 40.6 cm W x 46 cm D x 40.6 cm H (16\" x 18\" x 16\")\u003cbr\u003e- Loading: 4 removable internal stainless steel shelves; up to 16 available configurations\u003cbr\u003e- Filter: 0.5 Micron filter\u003cbr\u003e- Mass Flow Controls: Software Specifications:\u003cbr\u003e- Number of Recipes: 6 CVD, 4 Plasma\u003cbr\u003e- Range of Exposure Time: 0-999999\u003cbr\u003e- Resolution of Timer Setting: 1 second\u003cbr\u003ePerformance Specifications:\u003cbr\u003e- RF Plasma Frequency: 40 kHz\u003cbr\u003e- RF Plasma Power: 10-1000 Watts\u003cbr\u003e- Operation Temperature: Ambient to 205°C\u003cbr\u003e- Uniformity: ±5°C during dwell after stabilization period\u003cbr\u003e- Chemical Usage: Typical process 3-5 ml\u003cbr\u003e- Chemical Volume Control: Control down to 0.1 ml\u003cbr\u003e- Process Gas Inputs: 1\u003cbr\u003e- Plasma Gas Inputs: 3\u003cbr\u003e- Vent Gas Consumption: 10 SCF run average\u003cbr\u003e- Reactant Gas Consumption: 4.2 x 10-3 SCF (based on standard process: 170°C @ 1000 W w\/20 SCFM pump)\u003cbr\u003e- Wafer Throughput: Typically 1-2 loads\/hr; varies by process\u003cbr\u003e- Slide Throughput: 600 slides\/hr for CVD\u003cbr\u003eAdditional Specifications:\u003cbr\u003e- Safety: Audible and visual alarms; redundant over-temp monitoring\u003cbr\u003e- Power Requirements: 208 VAC, 30 A, 60 Hz, - Single Phase, 4835 Watts\u003cbr\u003e- Power Supply: Automatic Frequency Tuning","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":46441314484414,"sku":"150952","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/11_f53588c0-e8b7-4e48-9883-58c47dfbbdad.jpg?v=1772231488","url":"https:\/\/www.bridgetronic.com\/products\/150952","provider":"Bridge Tronic Global","version":"1.0","type":"link"}