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Applied Materials P 5000 Mark II DLH PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials P 5000 Mark II DLH PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials P 5000 Mark II DLH PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials P 5000 Mark II DLH PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials P 5000 Mark II DLH PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials P 5000 Mark II DLH PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Applied Materials P 5000 Mark II DLH PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Asset #: 150705

Make: Applied Materials

Model: P 5000 Mark II DLH

Wafer Sizes: 6 inch

Last Confirm Date: February 24, 2026

Applied Materials P 5000 Mark II DLH PECVD (Plasma-Enhanced Chemical Vapor Deposition), 6"
- Silane
- Phase 3 Cassette Handler
- Bolt-Down Lid
- Storage Elevator 8 Slots
- Expanded (21 Slot) VME
- Floppy Drive Type 3 Β½
- Mini-Controller
- Gas Panel Type 28 line
- CVD Chamber Items
- RF Match Type Phase IV
- Lid Type Boltdown
- Endpoint Standard
- Cathode Type Susceptor
- Lid Gas Distribution GDP
- RF Generator Rack
- Remote Frame w/AC Box
- Chamber Lid Type Details
Chamber Position AMAT
- Position A
- Position B
- Position C
- Position D
RF Generator Details
Chamber Position:
- Position A OEM 12B
- Position A
- Position B OEM 12B
- Position B
- Position C OEM 12B
- Position C
- Position D
- Position D
- CVD Chamber Roughing Pumps
- CVD Chamber Pump
- Manufacturer Edwards
- Model iH600
- Quantity Required 3
- Load Lock Pump
- Manufacturer Edwards
- Model iH80 Series
- Included With System
- Neslab Chiller
- Quantity Required 45659
- AMAT Heat Exchanger
- Key P5000 Mainframe Items
- Phase 3 Robot
System Configuration Chamber Type:
- Position A Silane DCVD
- Position B Silane DCVD
- Position C Silane DCVD
- Position D Empty
- Position E (Centura Only)
- Position F (Centura Only)
Front of System
- Ch F (C) Ch E (C)
- Ch D Ch C
- Ch B Ch A
- Gas Panel
- All Cables Present
- Install Type Through-the-wall
- Center finder board retrofitted for transparent and opaque substrates
- Software Version 5.0.1
- Remote Service Monitors
- Clean Room Manuals
2010 Vintage

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