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Applied Materials HEXP VIISta HE Implanter

Asset #: 150580

Make: Applied Materials

Model: HEXP VIISta HE

Wafer Sizes: 8 inch

Last Confirm Date: February 20, 2026

Applied Materials HEXP VIISta HE Implanter, 8"
Includes:
- Chiller: SMC remote 20M
- Cryo Pump: 320FE CRYO OBIS,6
- Cryo Pump Exhaust: SS Cryo Exhaust Through Roof
- Cryo Compressor: IS-1000 KPa X 3
- Dosimetry: Advanced
- Facilities: Faci fr Botm(Air-N2-H2O-Power)
- Frequency: 60 Hz Operation
- Label Kit: English
- Load Lock Vent: 500 Load LockVent Std Finish
- Load Lock Vent Connection: 500 Vent Con Std Finish
- Manometer: Triple Manometer 0-1 kPa
- NSR - Roplat/Tilter
- NSR - Platen Type 200mm SiC
- NSR - Pick and Pad Type
- Power Kit: Standard Power Kit
- Profiler: Standard Rack and Pinion
- Remote Harness Kit: 20M Rem Facilites Kit - Floor
- RP3 Exhaust: RP3 PVC Exhaust Line - Roof
- NSR - Source SiC
- UPS/CVCF: Standard UPS 3KVA - No CVCF
- NSR - Elevator chamber 200mm SiC
- VCS Software Package: VCS 9.XX (Specify revision)
- Roughing Pump Supply: Customer Supplied Pumps Onsite
- Turbo Pump Supply: VSE Supplied Pumps
- Wafer Handler Side Window Kit: Windows
- IAN Computer: w/ Hard disk drives
- Plasma flood gun: PFG w/ 50mil Filament
- Source shroud/bushing: Standard
- Terminal Ar/N2 gas panel: Remote supply
- Wedge: Standard
- Set up cup: Standard
- Enclosure: Standard
- NSR - Orienter SiC
Gas Box:
- Standard Gas Box - Short Stick
- Exhaust: FM4910 COMPLIANT
- Inert Feeds: Std Int Inert BoFeed Prge&Proc
- Gas Stick Slot 1: HP Ar
- Gas Stick Slot 2: HP N2 CGA 580
- Gas Stick Slot 3: SDS PH3 VCR 1/2
- Gas Stick Slot 4: SDS BF3 VCR 1/4
- Gas Stick Slot 5: SDS PF3 VCR 1/4 5SCCM
Installed Options
- Seismic Kit
- Leak check ports
End Station:
- Service PC II - Small
- NSR - 200mm SiC wafer on arm sense
- NSR - 200mm SiC Lift pins
Factory Automation:
- NSR - Buffer type 200mm EFEM
- NSR - Wafer viewing 10.4" No ID
- Signal Tower: 4 Light (LED) - RGOB + Alrm
Power/Remote/Util:
- Rmt Disc. w/ Mnting Stnd: Standard 4 Pole GFI Kit
- Remote EMO Shutdown Kit: 20m
- 4 Pole GFI Kit (Term PD only)
- 4 Pole GFI Option (Main PD)
Software:
- MTM and SPC viewer On-Tool Lic
- Low Energy Option
Tooling:
- NSR - Spare source and sputter module
NSR 200mm SiC platforms

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