{"product_id":"150555","title":"Axcelis GSD 100 Implanter","description":"Axcelis GSD 100 Implanter, 6\"\u003cbr\u003e- High Current: GSD 200 E\u003cbr\u003e- Date of Audit:August 25, 2025\u003cbr\u003e- Loading Configuration: Open Cassette\u003cbr\u003e- Software Version: 6.12.4\u003cbr\u003e- Automated Beam tuning \u0026amp; setup w\/Eaton Autotune\u003cbr\u003e- All cables present\u003cbr\u003e- GEM \/ SECS Interface\u003cbr\u003e- Beamline version: Standard\u003cbr\u003e- Energy Range: 160 KeV\u003cbr\u003e- Standard manuals included\u003cbr\u003e- 4 cassette compatibility\u003cbr\u003e- Automatic flat or notch alignment capability with buffer cassette\u003cbr\u003e- NV-GSD 200 Series Process Disk with active cooling \u0026amp; chiller\u003cbr\u003e- Single Stage Extraction: 80 keV\u003cbr\u003e- Post Accel electrode assembly: 80 -160 keV\u003cbr\u003e- Ion Source Type: ELS\u003cbr\u003e- Source Material: Moly\u003cbr\u003e- Flag Farady Injector\u003cbr\u003e- Signal tower\u003cbr\u003e- Cryo compressors: CTI 9600\u003cbr\u003e- Remote Disk Chiller: SMC HRS 050-WF-20\u003cbr\u003e- External Facilities connections: Ar, N2\u003cbr\u003e- Can't produce wafers as is\u003cbr\u003e- No Modifications\u003cbr\u003e- No SECS II Interface\u003cbr\u003e- No fab starter kit\u003cbr\u003e- No fast maintenance kit\u003cbr\u003e- No wafer top-side bar reading\u003cbr\u003e- No real time dose control\u003cbr\u003e- No real time beam profiler\u003cbr\u003e- No electron shower with gas bleed and closed loop control\u003cbr\u003e- No Slot-to-Slot Wafer Integrity (200 mm only)\u003cbr\u003e- Direct Rotory Drive\u003cbr\u003e- No Two Axis Variable Implant Angle (+\/- 11 Degrees in two axis) (Quad Implant Capability)\u003cbr\u003e- No Clean room manuals\u003cbr\u003e- No CE Mark\u003cbr\u003e- No OEM Audit available\u003cbr\u003e- No UPS\u003cbr\u003e- No enhanced low energy beamline\u003cbr\u003e- No triple index mass analysis magnet \u0026amp; power supply\u003cbr\u003e- No vaporizer \u003cbr\u003e- No variable aperture extraction electrode\u003cbr\u003e- No three position resolving aperture (90 keV only) \u003cbr\u003e- No In-Situ wafer charge monitor\u003cbr\u003e- No In-Situ particle detector HYT\u003cbr\u003e- No lead floor\u003cbr\u003e- No vacuum pumps\u003cbr\u003eBeamline \u0026amp; Source Pumps:\u003cbr\u003e- Source Turbo Pump (P1): STP A 2203 C 2\u003cbr\u003e- Beam Line Cryo Pump (P3): CTI Onboard 10\u003cbr\u003e- End Station Cryo Pump (P2): CTI Onboard 8\u003cbr\u003eGas:\u003cbr\u003e- Ar: Tylan FC-2900 MEP, 5 SCCM \u003cbr\u003e- BF3: Unit 1660 (SDS),5 SCCM\u003cbr\u003e- AsH3: Unit 1660 (SDS),5 SCCM\u003cbr\u003e- PH3: Unit 1660 (SDS),5 SCCM","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":46412930449598,"sku":"150555","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/2_35c5e016-0e00-44a6-a98e-8d352093f43b.jpg?v=1771622256","url":"https:\/\/www.bridgetronic.com\/products\/150555","provider":"Bridge Tronic Global","version":"1.0","type":"link"}