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Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter
Axcelis GSD 100 Implanter

Axcelis GSD 100 Implanter

Asset #: 150555

Make: Axcelis

Model: GSD 100

Wafer Sizes: 6 inch

Last Confirm Date: April 13, 2026

Axcelis GSD 100 Implanter, 6"
- High Current: GSD 200 E
- Date of Audit:August 25, 2025
- Loading Configuration: Open Cassette
- Software Version: 6.12.4
- Automated Beam tuning & setup w/Eaton Autotune
- All cables present
- GEM / SECS Interface
- Beamline version: Standard
- Energy Range: 160 KeV
- Standard manuals included
- 4 cassette compatibility
- Automatic flat or notch alignment capability with buffer cassette
- NV-GSD 200 Series Process Disk with active cooling & chiller
- Single Stage Extraction: 80 keV
- Post Accel electrode assembly: 80 -160 keV
- Ion Source Type: ELS
- Source Material: Moly
- Flag Farady Injector
- Signal tower
- Cryo compressors: CTI 9600
- Remote Disk Chiller: SMC HRS 050-WF-20
- External Facilities connections: Ar, N2
- Can't produce wafers as is
- No Modifications
- No SECS II Interface
- No fab starter kit
- No fast maintenance kit
- No wafer top-side bar reading
- No real time dose control
- No real time beam profiler
- No electron shower with gas bleed and closed loop control
- No Slot-to-Slot Wafer Integrity (200 mm only)
- Direct Rotory Drive
- No Two Axis Variable Implant Angle (+/- 11 Degrees in two axis) (Quad Implant Capability)
- No Clean room manuals
- No CE Mark
- No OEM Audit available
- No UPS
- No enhanced low energy beamline
- No triple index mass analysis magnet & power supply
- No vaporizer
- No variable aperture extraction electrode
- No three position resolving aperture (90 keV only)
- No In-Situ wafer charge monitor
- No In-Situ particle detector HYT
- No lead floor
- No vacuum pumps
Beamline & Source Pumps:
- Source Turbo Pump (P1): STP A 2203 C 2
- Beam Line Cryo Pump (P3): CTI Onboard 10
- End Station Cryo Pump (P2): CTI Onboard 8
Gas:
- Ar: Tylan FC-2900 MEP, 5 SCCM
- BF3: Unit 1660 (SDS),5 SCCM
- AsH3: Unit 1660 (SDS),5 SCCM
- PH3: Unit 1660 (SDS),5 SCCM

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