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Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)

Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)

Asset #: 150521

Make: Oxford

Model: PlasmaPro 100 Cobra

Last Confirm Date: February 19, 2026

Oxford PlasmaPro 100 Cobra ICP-RIE (Inductively Coupled Plasma - Reactive lon Etch)
- 208 V, 3 Phase, 50/60 Hz
- Configured for 6" substrates
Includes:
- Advanced Energy paramount MF 5003 RF Generator
- Pfeiffer Adixen Magpower Turbopump Controller
- Pfeiffer Adixen A 124 H Vacuum Pump
- Pfeiffer Adixen ZCP 15 G Vacuum Pump
- Gas Box
- Control Computer & LCD Monitor
- OS PTIQ Version 2021.12.2.0
2021 Vintage

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