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Hitachi S 9300 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi S 9300 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi S 9300 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi S 9300 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi S 9300 CD-SEM (Critical Dimension Scanning Electron Microscope)
Hitachi S 9300 CD-SEM (Critical Dimension Scanning Electron Microscope)

Hitachi S 9300 CD-SEM (Critical Dimension Scanning Electron Microscope)

Asset #: 150026

Make: Hitachi

Model: S 9300

Wafer Sizes: 8 inch

Last Confirm Date: February 09, 2026

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Hitachi S 9300 CD-SEM (Critical Dimension Scanning Electron Microscope), 8"
- 2 cassette holders with ergo flippers
Electron Optical System:
- Electron Gun: Schottky emission source
- Accelerating voltage: 500V to 1600V, 10V steps
- Probe Current: 4~24 pA with automated setting and measurement by Faraday cup
- Electromagnetic Lens: 3-Stage Electromagnetic Lens System with boosting voltage
- Objective Lens: 4 opening click stop, heated aperture is selectable/adjustable outside the vacuum
- Scan Coil: 2-Stage Electromagnetic Deflection
- Astigmatism correction via 8-pole electromagnetic coil
- Magnification = 1000x to >300000x
- Field control method ; Continuously on for sample de-charging, at all voltages
- Wafer imaging ability; entire surface of 8” or 12” wafer
- Depth of focus: ≥ 1.0 um at 80000x magnification
- Resolution: 3 nm (800V) Retarding/Boosting Mode
- Hitachi Probe Tip
Optical Microscope System
- Monochrome Image, using CCD camera
- 110x Magnification
Wafer Imaging:
- X coverage from 5 – 295 mm
- Y coverage from 5 – 195 mm
- Notch down
- Field of View: 1.2 mm
Workstation
- Model: HP B180L (9GB)
- O/S: Unix version HP-UX 10.20 or newer
- Software Version: 14.71 or newer
- SECS/GEM Communication Interface
- Dual XY Hitachi Microscale
- DSP Image Processing
- BSE Mode Functionality
- Multipoint Measurement Function
- Edge Roughness Function
- Automated Image Archiving Function

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