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Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter
Axcelis GSD 200 E 2 Ion Implanter

Axcelis GSD 200 E 2 Ion Implanter

Asset #: 149986

Make: Axcelis

Model: GSD 200 E 2

Wafer Sizes: 6 inch

Last Confirm Date: February 06, 2026

Axcelis GSD 200 E 2 Ion Implanter, 6"
- High Current:GSD-200EE
- Software Version 6.12.3
- Automated Beam tuning and Set-Up w/Eaton Autotune
- GEM/SECS Interface
- 4-Cassette Capability
- Ion Source Type: ELS
- Source Material Type: Moly
- Signal Tower
- Flag Faraday Injector
- Direct Rotory Drive
- Enhanced Low Energy Beamline
- Process Disk w/Active Cooling & Chiller
- Single Stage Extraction: 90keV
- Beamline Version: Standard
- Beamline and Source Pumps
- Block Upgrade
- Automatic Flat or Notch Alignment Capability w/buffer cassette
- Source Turbo Pump (P1): STP H2000C
- Beam Line Cryo Pump (P3): CTI Onboard 10
- End Station Cryo Pump (P2): CTI Onboard 8
- Gas Type: MFC Type and Model
- Ar: UNIT 1662 10SCCM - SDS
- BF3: UNIT 1662 10SCCM - SDS
- AsH3: UNIT 1662 10SCCM - SDS
- PH3: UNIT 1660 10SCCM - SDS
- External Facilities Connections: Ar N2
- Cryo Compressors: CTI 9600 (1)
- Remote Disk Chiller: SMC-HRS050
- Energy Range: 90KeV
- All Cables Present
- Standard Manuals
2001 Vintage

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