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Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter

Axcelis NV GSD HE Ion Implanter

Asset #: 149553

Make: Axcelis

Model: NV GSD HE

Wafer Sizes: 6, 8 inch

Last Confirm Date: January 26, 2026

Axcelis NV GSD HE Ion Implanter, 6", 8"
- Refurbished in 2023
- 6" Wafer Handling Station Installed
- 60 Hz
- 3 phase
- Full Load Current: 99 A
- Power: 82 kVA
- Input Breaker: 150 A
- Amp Rating Largest Load: 99 A
- Max Interrupt Capacity: 14 kA
- Beam Exhaust:1 MeV
- Beam Current: 1 mA
- Notch
- Dummy Cassette (25)
- Load Buffer (17)
- Vacuum Cassette (17)
- Beam Profile Oscilloscope
- Main Computer: Solaris, SW 5.3
- Main Monitor: LCD
- Second Computer: Solaris
- Second Monitor: LCD
Process Module:
- Disk Type: ACLS 11003980
- Faraday Flag
- In-vac Arm
- Water Holder
- Pedestal
- Gyro & Angle - Type & Degree: Alpha & Beta, +/-11 degrees
- Linear Driver
- Rotary Driver: 1200 rpm
Beamline Module:
- HV Power Supply: Hunting Hivolt
- HV Stack: Hunting Hivolt
- AMU: Buckley
- AMU PS: EMI
- Hall Probe: Magons
- Max Extraction Voltage; 90 kV
- No Decel Funtion
- No Beam Line Purge Kit
Source Module:
- Source Head: ELS
- Filament PS: Eaton
- Arc Ps: Eaton
- Cathode PS: Eaton
- Source Magnet: Eaton
- Extraction Assembly: Eaton 3 Axis
- Source Housing Exhaust Valve
Gas Box Module:
- Gas Box Type: Eaton 4 gas line gasbox
- Gas Loop #1: Non Toxic HHP
- Gas Loop #2: Toxic BF3 SDS
- Gas Loop #3: Toxic Helium HP
- Gas Loop #4: Toxic Hydrogen HP
- Loop #1 MFC: Brooks GF 100
- Loop #2 MFC: Brooks GF 120
- Loop #3 MFC: Brooks GF 100
- Loop #4 MFC: Brooks GF 100
Vacuum System:
- P1 Source Turbo: Edwards
- P1 Controller: Edwards
- P2 Resolving Cryo Pump: CTI 8"
- P3 V3 Cryo Pump: CTI 10"
- P3 Disk Cryo: Edwards Turbo
- RP1: Edwards Turbo
- RP2: Edwards iGX100L
- IG1: Standard HCIG
- IG2: Standard HCIG
- P4: Edwards Turbo
- P4 Controller: Edwards
- IG3: Stabil Ion Gauge
- IG Controller: Stabil Ion Gauge Controller
Sub System:
- Di Unit: Affinity TLC
- ISO Transformer
- Compressor 1 & 2: CTI
1999 Vintage

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