{"product_id":"149542","title":"Ulvac SDP 570 VMS In Line Sputtering","description":"Ulvac SDP 570 VMS In Line Sputtering\u003cbr\u003e- Sputter Method: (DC Magnetron Sputtering)\u003cbr\u003e- Takt Time (Cycle Time): 2.5 min\u003cbr\u003e- Loader \/ Unloader: Manual substrate Loading)\u003cbr\u003e- Elevator\u003cbr\u003e- Preparation Chamber\u003cbr\u003e- Isolation Room\u003cbr\u003e- Removal Chamber\u003cbr\u003e- Return Conveyor\u003cbr\u003e- Required Electric Power: 3 phase, 220 V, 60 Hz, 615 kVA\u003cbr\u003e- Substrate Material: Glass\u003cbr\u003e- Required Floor Space: Approx. W 7000 × L 32,000 × H 3000 mm\u003cbr\u003eProcess Chamber:\u003cbr\u003e- Sputtering Chamber\u003cbr\u003e- Input Chamber -\u0026gt; Cathode Chamber -\u0026gt; Output Chamber\u003cbr\u003eVacuum Conditions:\u003cbr\u003e- Preheat Chamber: ≤ 1 × 10⁻⁶ Torr\r- Sputtering Chamber: ≤ 1 × 10⁻⁶ Torr\r- Isolation Chamber: ≤ 1 × 10⁻⁶ Torr\u003cbr\u003ePump Down Time:\u003cbr\u003e- Preheat Chamber: Approx. 45 seconds from atmospheric pressure to 0.2 Torr\r- Removal Chamber: Approx. 45 seconds from atmospheric pressure to 0.2 Torr\u003cbr\u003eSputtering Conditions:\u003cbr\u003e- Target Attachment Method: Metal bonding to backing plate\u003cbr\u003e- Sputtering Pressure: 8 × 10⁻⁴ to 8 × 10⁻³ Torr\u003cbr\u003e- Thickness uniformity: 2.5 min \u003cbr\u003eFilm Thickness\u003cbr\u003e- 1100 Å\r- (Cr film, when takt time is 2.5 minutes)\u003cbr\u003eTarget Size\u003cbr\u003e- 144 mm × 690 mm × 6 mm\r- Substrate on both sides\u003cbr\u003eRequired Compressed Air:\u003cbr\u003e- 5–7 kg\/cm²G\r- Approx. 105.0 Nm³\/hr (average)\u003cbr\u003eRequired N2 Gas:\u003cbr\u003e- 0.5 kg\/cm²G\r- Max: approx. 202 Nm³\/hr\r- Normal: approx. 20.0 Nm³\/hr\u003cbr\u003eRequired Process Gases:\u003cbr\u003e- Ar: 0.5 kg\/cm²G, sccm\r- X: 0.5 kg\/cm²G, sccm\r- Y: 0.5 kg\/cm²G, sccm\r- Z: 0.5 kg\/cm²G, sccm\u003cbr\u003eRequired Water Cooling:\u003cbr\u003e- 2.5 kg\/cm²G\r- Approx. 25.2 m³\/hr\r- Water temperature: 15–30 °C\u003cbr\u003e1995 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45888085917886,"sku":"149542","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/8_03a187ec-4db1-4152-946f-65b1facd22a6.jpg?v=1769543672","url":"https:\/\/www.bridgetronic.com\/products\/149542","provider":"Bridge Tronic Global","version":"1.0","type":"link"}