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MxP Etch Chamber
MxP Etch Chamber
MxP Etch Chamber

MxP Etch Chamber

Asset #: 148607

Make: -

Model: -

Wafer Sizes: 8 inch

Last Confirm Date: January 16, 2026

MxP Etch Chamber, 8"
- Uni-body wall
- Uni-lid 0020-31831
- Extended cathode ESC process kit
- 1 torr process manometer
- Heated pumpstack with VAT gate valve HRTV throttle
- 0040-31911 ESC cathode
- RF match 0010-12090
- Edward turbo (requires overhaul)
- Magnet driver
- Turbo controller and cable
- Slit actuator and door

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