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PVA TePla PS 400 Microwave Plasma Cleaner

Asset #: 148375

Make: PVA TePla

Model: PS 400

Last Confirm Date: January 08, 2026

PVA TePla PS 400 Microwave Plasma Cleaner
Process Chamber Material: Aluminum
- Volume: 64 liters
Vacuum System:
- Connection: DN 63 ISO K
- Process Gas Control: 2 Gas Channels Standard, with MFC & Solenoid Valve
- Venting: Solenoid Valve
Microwave Generator:
- Adjustable magnetron, air-cooled, proprietary antenna and coupling geometry
- Frequency: 2.45 GHz
- Power Output: 0-1.000 W
Performance Data:
- Uptime: >95%
- MTBF: >500 h
- MTTR: <2 h
Microprocessor Controller:
- Numerical keys, cursor keys and function keys for system operation - Illuminated LC-display - Centronics printer interface - Parameter modification interlocked via key switch
Software
- Menu-driven system software - Manual and automatic operation, multiple recipe storage, system checks, warnings, actual/programmed parameter comparison with error messages, safety interlocks, etc. - Process recipe memory for up to 100 recipes, each with 1-5 subprograms
Supplies:
- Electricity: 230 V, single-phase, 16 A, 50/60 Hz
- Process gas: 1/4" Swagelok connector, input pressure 1-2 bar
- Compressed air: 1/4" Swagelok connector, input pressure 4-6 bar

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