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ONTO / Rudolph MetaPulse 200 Opaque Film Metrology Tool

Asset #: 14802

Make: ONTO / Rudolph

Model: MetaPulse 200

Last Confirm Date: February 23, 2017

ONTO / Rudolph MetaPulse 200 Opaque Film Metrology Tool
- MP Operator SW version 6.202P or higher
- Pattern recognition
- 8" ergonomic cassette tilt loaders
- Pulse Wafer Transport System
- 6" chuck, 200mm wafer probe
- 200mm linear positioning stage
- Ultrafast 800nm laser
- Pulse Optics Head
- Programmable motion controller
- Color printer (cleanroom approved)
- 266MHz Pentium II Motherboard
- 2GB hard drive
- CD ROM Drive
- LCD screen
- Keyboard and Trackball
- GEM compliant SEC-II

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