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Fujikoshi PFM 19 A / FEM 38 Polisher / Lapper
Fujikoshi PFM 19 A / FEM 38 Polisher / Lapper
Fujikoshi PFM 19 A / FEM 38 Polisher / Lapper
Fujikoshi PFM 19 A / FEM 38 Polisher / Lapper
Fujikoshi PFM 19 A / FEM 38 Polisher / Lapper
Fujikoshi PFM 19 A / FEM 38 Polisher / Lapper
Fujikoshi PFM 19 A / FEM 38 Polisher / Lapper
Fujikoshi PFM 19 A / FEM 38 Polisher / Lapper
Fujikoshi PFM 19 A / FEM 38 Polisher / Lapper

Fujikoshi PFM 19 A / FEM 38 Polisher / Lapper

Asset #: 147837

Make: Fujikoshi

Model: PFM 19 A / FEM 38

Wafer Sizes: 12 inch

Last Confirm Date: December 19, 2025

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Fujikoshi PFM 19 A / FEM 38 Polisher / Lapper, 12"
- Processing Method: Simultaneous Double sided Processing
- Control System: CNC with touch screen interface
- Power Requirements: 3 phase, 400 V, 50/60 Hz
- Automatic wafer handling & positioning system
- Real-time process monitoring & quality control
- Cleanroom compatible design (class 10-100)
- Multiple recipe storage & recall capability
- Integrated safety systems & emergency stops
- Low vibration & noise operation
- Data logging & traceability functions
Processing Capabilities:
- Wafer thickness uniformity: +/-0.5 µm across wafer surface
- Surface Roughness: Ra , 0.1 nm achievable
- Total thickness variation (TTV): < 0.3 µm
- Processing throughput: 60 - 120 wafers per hour (depending on specifications)
- Compatible with silicon, GaAs, InP, and other semiconductor materials
- Automatic thickness measurement & feedback control
- Edge exclusion zone < 2 mm from wafer edge
- Temperature controlled processing environment
2011 Vintage

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