{"product_id":"145862","title":"MRC P 603 Sputtering System","description":"MRC P 603 Sputtering System, 6\"\u003cbr\u003eControl System:\u003cbr\u003e- Mitsubishi PLC Sequencer Control Unit\u003cbr\u003e- Automatic pump-down and playback sequencing\u003cbr\u003e- Automatic flow control system\u003cbr\u003e- Automatic gas pressure control system\u003cbr\u003eProcess Chamber:\u003cbr\u003e- Vertical sputtering chamber, 3 target positions + 1 RF etch position\u003cbr\u003e- Chamber material: 1.6 cm stainless steel\u003cbr\u003e- Chamber size: 1765 cm (W) × 177 mm (D) × 584 mm (D)\u003cbr\u003e- Viewports: 6 (with shutters)\u003cbr\u003e- Exhaust ports: 18 cm CF (7-1\/8\")\u003cbr\u003eLoad Lock Chamber\u003cbr\u003e- Type: Two-level load-lock system\u003cbr\u003e- Vacuum seals: Pelos + Viton O-rings\u003cbr\u003e- Drive system: Hydraulic drive\u003cbr\u003e- Pallet movement: Horizontal, 5 positions\u003cbr\u003ePallets \u0026amp; Transport\u003cbr\u003e- Pallet material: Stainless steel\u003cbr\u003e- Pallet size: 330 × 330 × 8 mm\u003cbr\u003e- Drive: DC motor with tachometer feedback\u003cbr\u003e- Chain-driven closed-loop motion\u003cbr\u003e- Vacuum seals: Magnetic fluid seal + Viton O-ring\u003cbr\u003e- Scan speed range: 2 – 320 cm\/min (bi-directional)\u003cbr\u003eShutter System:\u003cbr\u003e- Material: Stainless steel\u003cbr\u003e- Drive: DC motor chain drive\u003cbr\u003e- Vacuum seal: Magnetic fluid seal + Viton O-Ring\u003cbr\u003eCathodes (Target Positions 1, 2, 3):\u003cbr\u003e- Type: Planar Magnetron Cathode\u003cbr\u003e- Target size: 120 mm × 378 mm\u003cbr\u003e- Material of body: Oxygen-free copper\u003cbr\u003e- Vacuum seal: Viton seal\u003cbr\u003e- Insulator: Teflon\u003cbr\u003e- Cooling: Water-cooled\u003cbr\u003eRF Etch Station:\u003cbr\u003e- Max power: 1.5 kW RF\u003cbr\u003e- Material: Stainless steel\u003cbr\u003e- Cooling: Water-cooled\u003cbr\u003e- Vacuum seals: Viton + bellows seal\u003cbr\u003e- Etch shield: Quartz glass edge, stainless steel dark-base shield\u003cbr\u003ePower Supplies:\u003cbr\u003eDC Power Supply:\u003cbr\u003e- Max power: 10 kW\u003cbr\u003e- Max voltage: 850 V\u003cbr\u003e- Max current: 25 A\u003cbr\u003eRF Power Supply:\u003cbr\u003e- Rated: 1.5 kW, 13.56 MHz\u003cbr\u003e- Auto-tuning circuits for: Cathodes and Etch station\u003cbr\u003e- Reflected power \u0026lt; 1% of rated\u003cbr\u003e- Traveling wave fluctuation: \u0026lt; 5%\u003cbr\u003eVacuum System – Process Chamber:\u003cbr\u003e- Cryo pump: CTI Cryo-Torr 8\u003cbr\u003e- Speed: 1500 L\/s\u003cbr\u003e- Compressor: Water-cooled compressor\u003cbr\u003e- High-vacuum valve: Air-pressure driven, 18 cm port\u003cbr\u003e- Throttle valve: 19.6 cm port\u003cbr\u003eVacuum System – Load Lock:\u003cbr\u003e- Coarse pump: ALCATEL rotary pump\u003cbr\u003e- Pumping speed: 760 L\/min\u003cbr\u003e- Foreline valve: 3.8 cm port\u003cbr\u003e- Drive: Air-pressure bellows drive\u003cbr\u003eVacuum Measurement:\u003cbr\u003e- High vacuum: B-A Ion Gauge\u003cbr\u003e- Rough vacuum: Thermocouple (T-C) gauge\u003cbr\u003e- Process gas pressure: MKS Baratron\u003cbr\u003e- Controller: Granville Vacuum Gauge System\u003cbr\u003eGas System:\u003cbr\u003e- Sputter gas: Argon (99.999%)\u003cbr\u003e- Flow: 50–150 SCCM\u003cbr\u003e- Gas pressure: 0.35–1.05 kg\/cm²\u003cbr\u003e- Stainless-steel gas piping\u003cbr\u003e- N₂ purge system\u003cbr\u003eElectrical\u003cbr\u003e- Voltage: 208 V (200 V) 3-phase\u003cbr\u003e- Frequency: 50\/60 Hz\u003cbr\u003e- RF power range: 0.3–1.5 kW\u003cbr\u003e- DC power range: 0.3–10 kW\u003cbr\u003eWater Requirements:\u003cbr\u003eSystem body:\u003cbr\u003e- Flow: 21.0 L\/min\u003cbr\u003e- Max inlet pressure: 6.3 kg\/cm²\u003cbr\u003e- Min differential pressure: 4.2 kg\/cm²\u003cbr\u003e- Temp range: 10–24 °C\u003cbr\u003eCryo compressor:\u003cbr\u003e- Flow: 9.5 L\/min\u003cbr\u003e- Pressure: ≥1.1 kg\/cm²\u003cbr\u003eVacuum Performance:\u003cbr\u003eProcess chamber:\u003cbr\u003e- Base pressure: 2×10⁻⁷ Torr\u003cbr\u003e- Pump-down: Atm → 1×10⁻⁶ Torr within 120 minutes\u003cbr\u003e- Leak rate: 2×10⁻⁷ Torr → 1×10⁻⁶ Torr \u0026gt; 20 minutes\u003cbr\u003eLoad lock:\u003cbr\u003e- Atm → 1×10⁻⁵ Torr in 8 minutes\u003cbr\u003e2006 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45649545625790,"sku":"145862","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/Semicore_MRC_P603_Photo_3.jpg?v=1764607314","url":"https:\/\/www.bridgetronic.com\/products\/145862","provider":"Bridge Tronic Global","version":"1.0","type":"link"}