{"product_id":"144465","title":"Nikon NSR 2005 i 9 C i-Line Stepper","description":"Nikon NSR 2005 i 9 C i-Line Stepper, 8\"\u003cbr\u003ePC \/ Control:\u003cbr\u003e- PC Model: Present (original PC type)\u003cbr\u003e- Hard Disk: Original\u003cbr\u003e- NEST Upgrade: Version: NEST-2\u003cbr\u003e- Software Version: MCS2 (OCSV blank)\u003cbr\u003eReticle \/ Mask:\u003cbr\u003e- Reticle Size: 6\"\u003cbr\u003e- Case Type: Nikon normal thickness type\u003cbr\u003eWafer Specs:\u003cbr\u003e- Wafer Size Supported: 8\"\u003cbr\u003e- Orientation Flat (OF) Direction: 0°\u003cbr\u003e- Wafer Chuck Type: Ring Type\u003cbr\u003e- O\/F or Notch: Notch\u003cbr\u003eOptical System:\u003cbr\u003e- Lens Type: 5iB3\u003cbr\u003e- Magnification: 1\/5 reduction\u003cbr\u003e- Field Size: 21 × 25.2 mm\u003cbr\u003e- Numerical Aperture (NA): 0.57 (range \u0026lt;0.57 \u0026gt;0.57 selectable)\u003cbr\u003e- Lamp Power: 1750 KW\u003cbr\u003e- Lamp Power Supply Type: Normal type\u003cbr\u003e- Exposure Light: i-line \u003cbr\u003eIllumination System:\u003cbr\u003e- Light Source: Mercury Lamp\u003cbr\u003e- Sigma (σ): 0.56 – 0.80\u003cbr\u003e- Exposure Time Control: Accumulated exposure control\u003cbr\u003e- Masking Function: Yes\u003cbr\u003eFocus \/ Lens Data:\u003cbr\u003e- Best Focus: 0.051 µm\u003cbr\u003e- Angle X\/Y\/P\/R (µrad): 0.62 \/ 4.36 \/ 2.64 \/ 3.52\u003cbr\u003e- Max-Min (µm): 0.28\u003cbr\u003e- Curvature: −0.094 µm\u003cbr\u003e- UR-LL \/ UL-LR (µm): 0.103 \/ 0.077\u003cbr\u003e- Distortion: MaxX \/ MinX: 0.029 \/ −0.046 nm\u003cbr\u003e- Distortion: MaxY \/ MinY: 0.025 \/ −0.062 nm\u003cbr\u003eWafer Alignment:\u003cbr\u003e- Alignment Light: HeNe Laser, Halogen Lamp\u003cbr\u003e- Method: CCD imaging + image processing\u003cbr\u003e- Mode: LSA (HeNe laser or FIA: halogen lamp)\u003cbr\u003eXY Stage:\u003cbr\u003e- Drive Method: Ball screw drive \u0026amp; two-axis interferometer\u003cbr\u003e- Stroke: X: −115 mm to +150 mm\u003cbr\u003e- Stroke: Y: −160 mm to +115 mm\u003cbr\u003eAuto Functions:\u003cbr\u003e- Auto Focus Method: Halogen lamp + AF line sensor\u003cbr\u003e- Wafer Leveling: Two-axis ball screw drive\u003cbr\u003eChamber \/ Environmental Control:\u003cbr\u003e- Cooling Method: Built-in refrigeration\/heating\u003cbr\u003e- Air-Cooled Temp Ctrl Unit: Booth \/ Stage \u003cbr\u003e- Chamber Set Temperature: 23 °C\u003cbr\u003e- Liquid Cooling Section: Built-in\u003cbr\u003eCamera \/ Vision:\u003cbr\u003e- Camera: CCD Type\u003cbr\u003e- FIA (Focus Image Analyzer): Yes – equipped but not used\u003cbr\u003e- LSA: Yes\u003cbr\u003e- Inline: Left In-line \u003cbr\u003eOther Equipment:\u003cbr\u003e- Reticle Microscope\u003cbr\u003e1992 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45560017584318,"sku":"144465","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_d208400d-0fc6-459f-9010-081fb923007e.jpg?v=1762364040","url":"https:\/\/www.bridgetronic.com\/products\/144465","provider":"Bridge Tronic Global","version":"1.0","type":"link"}