Nikon NSR 2005 i 9 C i-Line Stepper, 8"
PC / Control:
- PC Model: Present (original PC type)
- Hard Disk: Original
- NEST Upgrade: Version: NEST-2
- Software Version: MCS2 (OCSV blank)
Reticle / Mask:
- Reticle Size: 6"
- Case Type: Nikon normal thickness type
Wafer Specs:
- Wafer Size Supported: 8"
- Orientation Flat (OF) Direction: 0°
- Wafer Chuck Type: Ring Type
- O/F or Notch: Notch
Optical System:
- Lens Type: 5iB3
- Magnification: 1/5 reduction
- Field Size: 21 × 25.2 mm
- Numerical Aperture (NA): 0.57 (range <0.57 >0.57 selectable)
- Lamp Power: 1750 KW
- Lamp Power Supply Type: Normal type
- Exposure Light: i-line
Illumination System:
- Light Source: Mercury Lamp
- Sigma (σ): 0.56 – 0.80
- Exposure Time Control: Accumulated exposure control
- Masking Function: Yes
Focus / Lens Data:
- Best Focus: 0.051 µm
- Angle X/Y/P/R (µrad): 0.62 / 4.36 / 2.64 / 3.52
- Max-Min (µm): 0.28
- Curvature: −0.094 µm
- UR-LL / UL-LR (µm): 0.103 / 0.077
- Distortion: MaxX / MinX: 0.029 / −0.046 nm
- Distortion: MaxY / MinY: 0.025 / −0.062 nm
Wafer Alignment:
- Alignment Light: HeNe Laser, Halogen Lamp
- Method: CCD imaging + image processing
- Mode: LSA (HeNe laser or FIA: halogen lamp)
XY Stage:
- Drive Method: Ball screw drive & two-axis interferometer
- Stroke: X: −115 mm to +150 mm
- Stroke: Y: −160 mm to +115 mm
Auto Functions:
- Auto Focus Method: Halogen lamp + AF line sensor
- Wafer Leveling: Two-axis ball screw drive
Chamber / Environmental Control:
- Cooling Method: Built-in refrigeration/heating
- Air-Cooled Temp Ctrl Unit: Booth / Stage
- Chamber Set Temperature: 23 °C
- Liquid Cooling Section: Built-in
Camera / Vision:
- Camera: CCD Type
- FIA (Focus Image Analyzer): Yes – equipped but not used
- LSA: Yes
- Inline: Left In-line
Other Equipment:
- Reticle Microscope
1992 Vintage