Disco DTG 8460 Taiko Grinder, 12"
- 2 Load ports
- Power: 200 VAC, 3 Phase (Without Transformer)
- 50/60 Hz
- Full load current: 50 A
- Main breaker rating: 60 A
- Largest load amperage: 24 A
- Interrupt capacity: 35 kA
- Short circuit current rating: 1.5 kA
- Air pressure: 0.5 – 0.8 MPa
- Cooling water pressure: 0.2 – 0.3 MPa
- Maximum spindle speed: 7,000 rpm
Including:
- 3X Universal Chuck Table for 12"
- Low Vibration Air Bearing Spindle
- Robotic Wafer Transportation System
- Vacuum Pump System
- GUI (Graphical Operation Panel & Video Display Unit)
- Electrical Unit & Main Body Lifting Jig Set
- Signal Tower
- CE Mark & EMC Conformity
- English Operation / Trouble Shooting Manual
- Standard Accessories
Options:
- Duct Unit Assembly - Filtration & Air Suction
- Spindle Protection Device in case of air leakage switch to reserve air/N2
- Wafer Protection Device - hold Wafer during Vacuum leakage
- UPS (Uninterruptible Power Supply) with English Manual
- Disco Standard SECS / GEM Software IT Protocol
- T2 Pad Cleaning System (Standard: universal, non ceramic)
- Software Modification Offset for Positioning Table
- External Water Nozzle on Z1 + Z2 Wheel with Adjustable Flow Rate
- Adjustable Water Flow on T2 Pad to avoid drying up pad surface
- Automatic Set-up of wheel & chuck after wheel change
- Ionizer on Spinner Station
- Water Temperature Unit DTU 1531
- 2 Separate Temperature process cycles for spindle cooling water & grinding water (without transformer)
- FOUP Opener Unit Double Port with Mapping system
- Features for Fab Automation & Back Up
- Dedicated options to improve cleanliness / particle level
- Available option for accuracy improvement
- Machine Training
2020 Vintage