SPTS / STS Sigma FxP PVD (Physical Vapor Deposition), 6"
- Wafer: 8" compatible
Includes:
Control Racks
- Power Box (415 VAC, 3 Phase)
- Electronics Rack
- PSU Power Supplies
Interconnect Cables
Cryo Compressors
System Heat Exchanger
Chambers:
Station 1: Vacuum Cassette Handler (VCH)
- Cassette 1
Station 2: Pre Heat Chamber
- Pfeiffer TPH 062 turbo pump & TCP121 controller
- Base pressure <5E-7 Tor
- Mk1 3 KW lamp (provide wafer heating)
Station 3: W Dep Chamber
- Tungsten target – W 5N
- MDX II Advanced Energy 15 KW DC power supply
- Slow speed magnetron drive assembly
- Platen temperature 40°C
- An Onboard CTI 8F cryo pump, model 8116065G001
- Argon delivery through a 300 sccm N2 calibrated MFC
- Base pressure 7E-8 Torr
Station 4: Ti / TiN Dep chamber
- Titanium target - Ti 4N5
- MDX II Advanced Energy 15 KW DC power supply
- Standard speed magnetron drive assembly.
- Platen temp of 40ºC
- An Onboard CTI 8F cryo pump, model 8116065 G 001
- Argon delivery through a 300 sccm N2 calibrated MFC
- Nitrogen delivery through a 300 sccm N2 calibrated MFC
- Advanced energy RFX-600 13.56 MHz RF generator
- Base pressure <7E-8 Torr
Station 5: Soft Sputter Etch Chamber
- Advanced Energy RFX-600 13.56 MHz RF generator for platen RF.
- Aviza LF24 350 KHz RF generator for coil RF.
- Argon delivery through 30 sccm N2 calibrated MFC
- Onboard CTI 8F cryo pump, model 8116065 G 001
- Aviza Silicon oil chiller to control wafer temp (on the pedestal)
- Base pressure <7-8 Torr
Station 6: Vacuum Cassette Handler (VCH)
- Cassette 2
Stations have used targets installed