{"product_id":"144083","title":"SPTS \/ STS Sigma FxP PVD (Physical Vapor Deposition)","description":"SPTS \/ STS Sigma FxP PVD (Physical Vapor Deposition), 6\"\u003cbr\u003e- Wafer: 8\" compatible\u003cbr\u003eIncludes:\u003cbr\u003eControl Racks\u003cbr\u003e- Power Box (415 VAC, 3 Phase)\u003cbr\u003e- Electronics Rack\u003cbr\u003e- PSU Power Supplies\u003cbr\u003eInterconnect Cables\u003cbr\u003eCryo Compressors\u003cbr\u003eSystem Heat Exchanger\u003cbr\u003eChambers:\u003cbr\u003eStation 1: Vacuum Cassette Handler (VCH)\u003cbr\u003e- Cassette 1 \u003cbr\u003eStation 2: Pre Heat Chamber\u003cbr\u003e- Pfeiffer TPH 062 turbo pump \u0026amp; TCP121 controller \u003cbr\u003e- Base pressure \u0026lt;5E-7 Tor \u003cbr\u003e- Mk1 3 KW lamp (provide  wafer heating)\u003cbr\u003eStation 3: W Dep Chamber \u003cbr\u003e- Tungsten target – W 5N \u003cbr\u003e- MDX II Advanced Energy 15 KW DC power supply \u003cbr\u003e- Slow speed magnetron drive assembly \u003cbr\u003e- Platen temperature 40°C \u003cbr\u003e- An Onboard CTI 8F cryo pump, model 8116065G001 \u003cbr\u003e- Argon delivery through a 300 sccm N2 calibrated MFC \u003cbr\u003e- Base pressure 7E-8 Torr \u003cbr\u003eStation 4: Ti \/ TiN Dep chamber \u003cbr\u003e- Titanium target - Ti 4N5 \u003cbr\u003e- MDX II Advanced Energy 15 KW DC power supply \u003cbr\u003e- Standard speed magnetron drive assembly. \u003cbr\u003e- Platen temp of 40ºC \u003cbr\u003e- An Onboard CTI 8F cryo pump, model 8116065 G 001 \u003cbr\u003e- Argon delivery through a 300 sccm N2 calibrated MFC \u003cbr\u003e- Nitrogen delivery through a 300 sccm N2 calibrated MFC \u003cbr\u003e- Advanced energy RFX-600 13.56 MHz RF generator \u003cbr\u003e- Base pressure \u0026lt;7E-8 Torr \u003cbr\u003eStation 5: Soft Sputter Etch Chamber \u003cbr\u003e- Advanced Energy RFX-600 13.56 MHz RF generator for platen RF. \u003cbr\u003e- Aviza LF24 350 KHz RF generator for coil RF. \u003cbr\u003e- Argon delivery through 30 sccm N2 calibrated MFC \u003cbr\u003e- Onboard CTI 8F cryo pump, model 8116065 G 001 \u003cbr\u003e- Aviza Silicon oil chiller to control wafer temp (on the pedestal)\u003cbr\u003e- Base pressure \u0026lt;7-8 Torr \u003cbr\u003eStation 6: Vacuum Cassette Handler (VCH)\u003cbr\u003e- Cassette 2\u003cbr\u003eStations have used targets installed","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45534737072318,"sku":"144083","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_a1293f14-c575-47f3-95ca-af741e40e81e.jpg?v=1761676941","url":"https:\/\/www.bridgetronic.com\/products\/144083","provider":"Bridge Tronic Global","version":"1.0","type":"link"}