{"product_id":"144082","title":"SPTS \/ STS Sigma PVD (Physical Vapor Deposition)","description":"SPTS \/ STS Sigma PVD (Physical Vapor Deposition), 6\"\u003cbr\u003e- Beta System\u003cbr\u003eIncludes:\u003cbr\u003eControl Racks\u003cbr\u003e- Power Box (415 VAC, 3 Phase)\u003cbr\u003e- Electronic Rack\u003cbr\u003e- PSU Power Supplies\u003cbr\u003eInterconnect Cables\u003cbr\u003eCryo Compressors\u003cbr\u003eSystem Heat Exchanger\u003cbr\u003eChambers:\u003cbr\u003eStation 1: Vacuum Cassette Handler (VCH)\u003cbr\u003e- Cassette 1 \u003cbr\u003eStation 2: Pre Heat Chambers\u003cbr\u003e- Pfeiffer TPH 062 turbo pump \u0026amp; TCP121 controller \u003cbr\u003e- A 1KW lamp for wafer heating\u003cbr\u003eStation 3: Aluminum Dep Chamber\u003cbr\u003e- Aluminium target - Al\/0.5% Cu \u003cbr\u003e- MDX II Advanced Energy 15 KW DC power supply \u003cbr\u003e- Standard speed magnetron drive assembly fitted. \u003cbr\u003e- Shut-idle-vent recipe temp of 150C \u003cbr\u003e- CT8 cryo pump \u003cbr\u003e- Argon delivery through a 300 sccm N2 calibrated MFC \u003cbr\u003e- Base pressure 7E-8 Torr\u003cbr\u003eStation 4: Ti\/TiN Dep chamber \u003cbr\u003e- Titanium target - Ti 4N5 \u003cbr\u003e- MDX II Advanced Energy 15 KW DC power supply \u003cbr\u003e- Standard speed magnetron drive assembly. \u003cbr\u003e- Shut-idle-vent recipe temp of 40C \u003cbr\u003e- CT8 cryo pump \u003cbr\u003e- Argon delivery through a 300 sccm N2 calibrated MFC \u003cbr\u003e- Nitrogen delivery through a 100 sccm N2 calibrated MFC \u003cbr\u003e- Advanced energy RFX-600 13.56 MHz RF generator \u003cbr\u003e- Base pressure \u0026lt;7E-8 Torr\u003cbr\u003eStation 5: Soft Sputter Etch chamber \u003cbr\u003e- Advanced energy RFX-600 A 13.56 MHz RF generator \u003cbr\u003e- An Aviza LF24 350KHz RF generator for coil RF. \u003cbr\u003e- Argon delivery through 30 sccm N2 calibrated MFC \u003cbr\u003e- CT8 cryo pump \u003cbr\u003e- Aviza Silicon oil chiller to control wafer temp whist on the pedestal. \u003cbr\u003e- Base pressure \u0026lt;7E-8 Torr \u003cbr\u003eStation 6: Vacuum Cassette Handler (VCH)\u003cbr\u003e- Cassette 2\u003cbr\u003eStations have used targets installed\u003cbr\u003eComputer System doesn't boot up (suspect hard drive issue)","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45526891069630,"sku":"144082","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_7f64e983-1bb2-46ac-84db-d36c8821bde0.jpg?v=1761674478","url":"https:\/\/www.bridgetronic.com\/products\/144082","provider":"Bridge Tronic Global","version":"1.0","type":"link"}