SPTS / STS Sigma PVD (Physical Vapor Deposition), 6"
- Beta System
Includes:
Control Racks
- Power Box (415 VAC, 3 Phase)
- Electronic Rack
- PSU Power Supplies
Interconnect Cables
Cryo Compressors
System Heat Exchanger
Chambers:
Station 1: Vacuum Cassette Handler (VCH)
- Cassette 1
Station 2: Pre Heat Chambers
- Pfeiffer TPH 062 turbo pump & TCP121 controller
- A 1KW lamp for wafer heating
Station 3: Aluminum Dep Chamber
- Aluminium target - Al/0.5% Cu
- MDX II Advanced Energy 15 KW DC power supply
- Standard speed magnetron drive assembly fitted.
- Shut-idle-vent recipe temp of 150C
- CT8 cryo pump
- Argon delivery through a 300 sccm N2 calibrated MFC
- Base pressure 7E-8 Torr
Station 4: Ti/TiN Dep chamber
- Titanium target - Ti 4N5
- MDX II Advanced Energy 15 KW DC power supply
- Standard speed magnetron drive assembly.
- Shut-idle-vent recipe temp of 40C
- CT8 cryo pump
- Argon delivery through a 300 sccm N2 calibrated MFC
- Nitrogen delivery through a 100 sccm N2 calibrated MFC
- Advanced energy RFX-600 13.56 MHz RF generator
- Base pressure <7E-8 Torr
Station 5: Soft Sputter Etch chamber
- Advanced energy RFX-600 A 13.56 MHz RF generator
- An Aviza LF24 350KHz RF generator for coil RF.
- Argon delivery through 30 sccm N2 calibrated MFC
- CT8 cryo pump
- Aviza Silicon oil chiller to control wafer temp whist on the pedestal.
- Base pressure <7E-8 Torr
Station 6: Vacuum Cassette Handler (VCH)
- Cassette 2
Stations have used targets installed
Computer System doesn't boot up (suspect hard drive issue)