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Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography
Elionix EBW 7800 C E-Beam Lithography

Elionix EBW 7800 C E-Beam Lithography

Asset #: 143115

Make: Elionix

Model: EBW 7800 C

Wafer Sizes: 6 inch

Last Confirm Date: October 15, 2025

Elionix EBW 7800 C E-Beam Lithography, 6"
- 200 V, 60 Hz
- Dual wideband DC field sensors
Control Cabinets (3):
- Anelva PIC-055-IP ion pump controllers (2)
- Lambda UP60-7 DC power supply
- Varian Turbo-V 81-AG turbopump controller
- BOC Edwards STP-L451 turbopump controller
- Iwatsu ST-3708E laser displacement meter
- Vacuum control
- Loading control
- Penning gauge
- Stage driver
- Stage rotation driver
- Rotation controller
- SIP back-up PSU
- HV power supply
- Baking control
- Field correction
- Formatter IFU
- Aperture driver
- Spicer Consulting SC20 field cancelling system
2009 Vintage

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