{"product_id":"140824","title":"Hitachi S 9220 CD-SEM (Critical Dimension Scanning Electron Microscope)","description":"Hitachi S 9220 CD-SEM (Critical Dimension Scanning Electron Microscope), 12\"\u003cbr\u003e- Wafer: Notch\u003cbr\u003e- Length Measurement Method: Cursor \u0026amp; Line Profile Method\u003cbr\u003e- Measuring Range: 0.1 μm ～ 2.0 μm\u003cbr\u003e- Length Measurement Reproducibility: ± 1% or 3 nm (3σ) larger value\u003cbr\u003e- Throughput: Continuous measurement mode 56 wafers \/ hr\u003cbr\u003e- Length Measurement Reproduction Accuracy: 40k-150k-200k times \u003cbr\u003e- For magnification exceeding 150k times, the effect of electron beam irradiation shall be excluded\u003cbr\u003eMeasuring Mode: Automatic \u0026amp; Manual \u003cbr\u003e- Secondary Electron Image Resolution: 3 nm (acceleration voltage 0.8 kV)\u003cbr\u003eImage Magnification: \u003cbr\u003e- Optical Microscope Image: Approx 110 times\u003cbr\u003e- SEM Image: 1k to 300k times\u003cbr\u003eStage: \u003cbr\u003e- Range of Movement: X-axis: 0-200 mm, Y-axis: 0-200 mm\u003cbr\u003e- Drive System: Pulse Motor Drive\u003cbr\u003e- Control: Computer control, positioning control by linear encoder\u003cbr\u003e- Drive Speed: Max. 100 mm \/ sec (each X-axis \u0026amp; Y-axis)\u003cbr\u003eLoader System:\u003cbr\u003e- Wafer Carrier -\u0026gt; Loader Room:Automatic transfer by wafer transfer robot\u003cbr\u003eWafer Transfer Robot:\u003cbr\u003e- Method: Random access type for 2 cassettes\u003cbr\u003e- Wafer Detection in Cassette: Wafer Searcher Built-in\u003cbr\u003e- Chucking Method: Vacuum suction on the back side of the wafer\u003cbr\u003e- OF, V-notch Detection: Automatic detection by optical sensor\u003cbr\u003eElectron Optics:\u003cbr\u003e- Acceleration Voltage: 500 to 1600 V (variable in 10 V steps)\u003cbr\u003e- Lens System: Electromagnetic Lens System, Booster Stock Lens\u003cbr\u003e- Detection System: Scintillator \/ photomultiplier detector using EXB filter\u003cbr\u003e- 2 stage detection method for SE and BSE images\u003cbr\u003e- Objective Lens Diaphragm: Heated thin film movable pattern (4 holes switching from outside the vacuum) with fine adjustment mechanism\u003cbr\u003e- Scanning Coil: 2-stage electromagnetic deflection\u003cbr\u003e- Astigmatism Correction: 8-pole electromagnetic system (X, Y)\u003cbr\u003e- Prove Current Monitor: Built-in Faraday cup, with automatic measurement function\u003cbr\u003e- Optical Microscope: Approximately 1.2 mm square field of view, with black and white CCD camera\u003cbr\u003eControl \/ Display System:\u003cbr\u003e- Observation and Control CRT: EWS (GUI) 21-inch CRT\u003cbr\u003e- Combined use of SEM image \/ optical image display and computer dialogue operation\u003cbr\u003e- Display measurement conditions, wafer map, length measurement value, stage coordinates\u003cbr\u003e- Scanning Mode: TV scan, with auto brightness \/ contrast function\u003cbr\u003e- Image Processing: Image processing by software using filtering\u003cbr\u003e- Real-time image processing (optional) using DSP\u003cbr\u003e- Image Recording: Video printing device (optional) \u0026amp; image file save function (optional)\u003cbr\u003e- Safety Device: With emergency shutoff switch (mushroom type)\u003cbr\u003eLength Measurement Data Processing: \u003cbr\u003e- File Save Function: Various measurement condition file save function\u003cbr\u003e- Storage Medium: 9G byte hard disk (including for system programs)\u003cbr\u003e- Auxiliary Storage Medium: 3.5-inch magneto-optical disk driver, 3.5-inch F \/ D driver\u003cbr\u003e- Data Embedding Function: Statistical calculation function using worksheets (mean value, standard deviation, etc.)\u003cbr\u003e- Real-time length measurement value graph display function\u003cbr\u003e- Print Output: 80-digit thermal printer\u003cbr\u003eVacuum Exhaust System:\u003cbr\u003e- Method: Fully automatic dry clean exhaust system\u003cbr\u003e- Vacuum Pump: 3 ion pumps, Two turbo molecular pumps, 2 dry pumps (supplied)\u003cbr\u003eSupplied Function:\u003cbr\u003e-  Protection function in the event of a power outage\u003cbr\u003e- AIR pressure drop\u003cbr\u003e- Cooling water flow rate drop (self) with dynamic valve closing function\u003cbr\u003e- Pump stop function","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45412554211518,"sku":"140824","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_7667ee6b-f3c5-4f58-bbf8-441e28f10741.jpg?v=1758062346","url":"https:\/\/www.bridgetronic.com\/products\/140824","provider":"Bridge Tronic Global","version":"1.0","type":"link"}