{"product_id":"140822","title":"Hitachi S 9220 CD-SEM (Critical Dimension Scanning Electron Microscope)","description":"Hitachi S 9220 CD-SEM (Critical Dimension Scanning Electron Microscope), 8\"\u003cbr\u003e- Wafer: Notch\u003cbr\u003e- Length Measurement: Cursor \u0026amp; Line Profile Method\u003cbr\u003e- Measuring Range: 0.1 μm ～ 2.0 μm\u003cbr\u003e- Throughput: Continuous measurement mode, 56 wafer \/ hr\u003cbr\u003e- Secondary Electron Image Resolution: 3 nm (acceleration voltage 0.8 kV)\u003cbr\u003eLength Measurement Reduction Accuracy: \u003cbr\u003e- 4k-15k-200k times\u003cbr\u003e- For magnification exceeding 150k times, the effect of electron beam irradiation shall be excluded\u003cbr\u003eImage Magnification: \u003cbr\u003e- Optical microscope image:  Approx. 110 times\u003cbr\u003e- SEM Image: 1k to 300k times\u003cbr\u003e- Measurement Mode: Automatic Measurement, Manual Measurement\u003cbr\u003eStage:\u003cbr\u003e- Range of Movement: X-axis: 0-200 mm, Y-axis: 0-200 mm\u003cbr\u003e- Drive System: Pulse Motor Drive\u003cbr\u003e- Control: Computer Control, Positioning control by linear encoder\u003cbr\u003e- Drive Speed: Max. 100 mm \/ sec (each X-axis \u0026amp; Y-axis)\u003cbr\u003eLoader System:\u003cbr\u003e- Wafer Carrier -\u0026gt; Loader Room: Automatic Transfer by Wafer Transfer Robot\u003cbr\u003e- Between Loader Room \u0026amp; Stage: Automatic Vacuum Exhaust, Automatic Loading\u003cbr\u003eWafer Transfer Robot:\u003cbr\u003e- Method: Random access type for 2 cassettes\u003cbr\u003e- Wafer Detection in Cassette: Wafer Searcher Built in\u003cbr\u003e- Chucking Method: Vacuum Suction on the back side of the wafer\u003cbr\u003e- OF, V-notch Detection: Automatic Detection by Optical Sensor\u003cbr\u003eElectron Optics:\u003cbr\u003e- Acceleration Voltage: 500 to 1600 V (variable in 10 V steps)\u003cbr\u003e- Lens System: Electromagnetic Lens System, Booster Stock Lens \u003cbr\u003e- Detection System: Scintillator \/ Photomultiplier Detector using EXB Filter\u003cbr\u003e- Two-stage detection method for SE and BSE images\u003cbr\u003e- Objective Lens Diaphragm: Heated thin film movable pattern (4 hole switching from outside the vacuum) with fine adjustment mechanism\u003cbr\u003e- Scanning Coil: 2-stage Electromagnetic Deflection\u003cbr\u003e- Astigmatism Correction: 8-pole Electromagnetic System (X,Y)\u003cbr\u003e- Prove Current Monitor: Built-in Faraday Cup, with automatic measurement function\u003cbr\u003e- Optical Microscope: Approx. 1.2 mm square field of view, with black \u0026amp; white CCD camera\u003cbr\u003eControl \/ Display System:\u003cbr\u003e- Observation \u0026amp; Control CRT: EWS (GUI) 21 inch CRT\u003cbr\u003e- Combined use of SEM image \/ optical image display \u0026amp; computer dialogue operation\u003cbr\u003e- Display measurement conditions, wafer map, length measurement value, stage coordinates\u003cbr\u003e- Scanning Mode: TV Scan, with auto brightness \/ contrast function\u003cbr\u003e- Image Processing: Software using filtering \u003cbr\u003e- Real time image processing (optional) using DSP\u003cbr\u003e- Image Recording: Optional video printing device \u0026amp; image file save function\u003cbr\u003e- Safety Device: With emergency shutoff (mushroom type)\u003cbr\u003eLength Measurement Data Processing:\u003cbr\u003e- File Saving Function: Various measurement condition file save function\u003cbr\u003e- Storage Medium: 9G byte hard disk (including for system programs)\u003cbr\u003e- Auxiliary Storage medium: 3.5 inch magento-optical disk driver, 3,5 inch F \/ D River\u003cbr\u003e- Data Embedding Function: Statistical calculation function using worksheets (mean value, standard deviation, etc.)\u003cbr\u003e- Real time length measurement value graph display function\u003cbr\u003e- Print Output: 80 digit  thermal printer\u003cbr\u003eVacuum Exhaust System:\u003cbr\u003e- Method: Fully automatic dry clean exhaust system\u003cbr\u003e- Vacuum pump: 3 ion pumps, two turbo molecular pumps, 2 dry pumps (supplied)\u003cbr\u003eSafety Function:\u003cbr\u003e-  Protection function in the event of a power outrage\u003cbr\u003e- Air pressure drop\u003cbr\u003e- Cooling water flow rate drop (self) with dynamic valve closing function\u003cbr\u003e- Pump stop function","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45412440015038,"sku":"140822","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_c7739160-67d7-4680-87e0-e74b4c16568a.jpg?v=1758058149","url":"https:\/\/www.bridgetronic.com\/products\/140822","provider":"Bridge Tronic Global","version":"1.0","type":"link"}