ASML Twinscan XT 1950 Hi Scanner, 12"
- HDD included
- Process: 193 mm immersion lithography for 38 nm resolution capacity
Key Specifications:
- Resolution: 38 nm Overlay: 4 nm SMO / 7 nm MMO
- Throughput: 148 wph (300 mm with 125 exposures at 30 ml)
- Zeiss Starlith 1950 with max NA of 1.35 or equivalent illumination system
- Aerial XP illumination system
- P Type illuminator alignment
- Blue alignment - Blue align with Athena narrow marks leveling
- Focus and field by field leveling reticle management
- Load Ports Laser
- Class 1 environment with semi compliant MENV & FIMS assemblies controls
- UNIX / SUN architecture
Cymer XLR 560 i:
- 193 nm
- 60 W / 6 khz Laser
- With E 95 bandwith monitoring environment
Standard Capabilities:
- Focus Spot Monitoring
- Circuit Dependent Focus Edge Clearance
- CD-FEC Dual E-Chucks (bonded SiSiC)
- Image Streaming - Lot Streaming & LS Match 2 (XT)
- Lot Overhead Reduction 1 & 2
- Productivity Enhancement Package PEP XT: 1950 Hi
- In-Situ Metrology (ILIAS Software & Sensor)
- LithoGuide ILIAS (SAMOS & PUPICON)
- UNICOM XT - DoesMapper ArF
- QUASAR XL (15 slot)
- Reticle Shape Correction
- 2DE Grind Calibration
- Twinscan Overlay Package TOP XT: 1950 Hi Additional Options
- Water Cooling for Electronics Cabinet - Customized Illumination
- Multiple DOEs - Integrated Reticle Library IRL-XP for H-SPEC Systems
- Integrated Reticle Inspection System IRIS-XT
- Reticle Streaming: Spotless G & H
- GridMapper Twinscan
- FSM Flex Package for Twinscan
- Aux Port 300 mm FOUP / 25 Wafer
- Smash XY Reticles: -40 nm Defect, Single Lot Tst Overlay Support Equipment
- Power Conditioner: 135 kVA Power Conditioning & Distribution Unit (Teal Model PCDU-XT 1900)
- XCDA Gas Purification System Backup Purifier Canister: Optics Series, 10 MH, SS
- CE marked
XCDA Gas Purification System Bypass Manifold:
- Maifold 3 Valve 10 M
- Filtering Housing
- Cabinet
- ESI VaporSorb EX 2600
-Filter Set Standards & Compliance