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Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System
Applied Materials / Varian VIISTA Trident XP Ion Implant System

Applied Materials / Varian VIISTA Trident XP Ion Implant System

Asset #: 139318

Make: Applied Materials / Varian

Model: VIISTA Trident XP

Last Confirm Date: September 03, 2025

Applied Materials / Varian VIISTA Trident XP Ion Implant System
- Process Type: Standard
- Scan Harness: Standard - Continuous
- Beamline: XP
- Profiler: Gen II Multipixel 2 piece cup
- Process Chamber Line Kit: Full Coverage
- Seismic Kit: Seismic
- Chiller: SMC Remote 20M
- Differential pumping: Standard
- Cryo Pump: OBIS 320FX w/ IS2000V(1) PSI
- Cryo Pump Facilities POC: SS Cryo Exh UP-Rough. DN-Hel.DN
- Power Kit: Std w/3 Pole 175A
- UPS: Standard UPS 3KVA
- Facilities (Air-N2-H2O): Faci fr Bott w Manifold - Std
- Frequency: 60 Hz Operation
- Injector Kit: XP (LDPL) Vapo Ready
- Control system: w/ Hard disk drives
- Label Kit: Chinese Label Kit
- Load Lock Vent: Standard Finish
- Load Lock Vent Connection: Vent Connection Std Finish
- Elevator Chamber selection: Standard - TGV w/Peek
- Orienter Selection: Laser - Belt drive 300mm
- Remote Harness Kit: 20M-Rem Harn/Heli-IS2000V
- Roughing Pump Supply: Customer Supplied Pumps Onsite
- Rough Pump Type: Edwards iGX100MTi - iGX100L
- Rough Pump Exhaust: Universal RP Exh - Floor
- Turbo Pump Supply: Customer Supplied Pumps Onsite
- Turbo Pump Type: Pfeiffer HI-PACE 2300
- Wafer Handler Side Window Kit: Side Window Kit
- VCS Software Package Version: VCS 9.XX (Latest revision)
- Plasma Flood Gun: XP-Standard
Gas Box
- Gas Box: 10 Position
- Gas Box Exhaust: 10 Stk GB Dual Exh FM4910 - Up
- Manometer: Quad Mano 10Stk GB 0-1000 Pa
- Gas Stick Slot 1: HP Ar/N2 CGA 580
- Gas Stick Slot 2: PraxAir Boron VCR 1/4
- Gas Stick Slot 3: PraxAir Arsine
- Gas Stick Slot 4: PraxAir Phosphine
- NSR - Gas Stick Slot 5: Praxair CO
- Gas Stick Slot 6: PraxAir GeF4
- NSR - Gas Stick Slot 7: Praxair Boron VCR 1/4
- Gas Stick Slot 8: XeH2
- Gas Stick Slot 9: HP N2 CGA 580
- Purge Assembly Slot 7 & 10: N2 w/Ext Fd - 10 Stick
- SS gaskets for all gas sticks: 10 stick gas box
- Argon External Purge Assembly: Ar Ext Purge w/Reg (Pos1)-Std

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