{"product_id":"139318","title":"Applied Materials \/ Varian VIISTA Trident XP Ion Implant System","description":"Applied Materials \/ Varian VIISTA Trident XP Ion Implant System\u003cbr\u003e- Process Type: Standard\u003cbr\u003e- Scan Harness: Standard - Continuous\u003cbr\u003e- Beamline: XP\u003cbr\u003e- Profiler: Gen II Multipixel 2 piece cup\u003cbr\u003e- Process Chamber Line Kit: Full Coverage\u003cbr\u003e- Seismic Kit: Seismic\u003cbr\u003e- Chiller: SMC Remote 20M\u003cbr\u003e- Differential pumping: Standard\u003cbr\u003e- Cryo Pump: OBIS 320FX w\/ IS2000V(1) PSI\u003cbr\u003e- Cryo Pump Facilities POC: SS Cryo Exh UP-Rough. DN-Hel.DN\u003cbr\u003e- Power Kit: Std w\/3 Pole 175A\u003cbr\u003e- UPS: Standard UPS 3KVA\u003cbr\u003e- Facilities (Air-N2-H2O): Faci fr Bott w Manifold - Std\u003cbr\u003e- Frequency: 60 Hz Operation\u003cbr\u003e- Injector Kit: XP (LDPL) Vapo Ready\u003cbr\u003e- Control system: w\/ Hard disk drives\u003cbr\u003e- Label Kit: Chinese Label Kit\u003cbr\u003e- Load Lock Vent: Standard Finish\u003cbr\u003e- Load Lock Vent Connection: Vent Connection Std Finish\u003cbr\u003e- Elevator Chamber selection: Standard - TGV w\/Peek\u003cbr\u003e- Orienter Selection: Laser - Belt drive 300mm\u003cbr\u003e- Remote Harness Kit: 20M-Rem Harn\/Heli-IS2000V\u003cbr\u003e- Roughing Pump Supply: Customer Supplied Pumps Onsite\u003cbr\u003e- Rough Pump Type: Edwards iGX100MTi - iGX100L\u003cbr\u003e- Rough Pump Exhaust: Universal RP Exh - Floor\u003cbr\u003e- Turbo Pump Supply: Customer Supplied Pumps Onsite\u003cbr\u003e- Turbo Pump Type: Pfeiffer HI-PACE 2300\u003cbr\u003e- Wafer Handler Side Window Kit: Side Window Kit\u003cbr\u003e- VCS Software Package Version: VCS 9.XX (Latest revision)\u003cbr\u003e- Plasma Flood Gun: XP-Standard\u003cbr\u003eGas Box\u003cbr\u003e- Gas Box: 10 Position\u003cbr\u003e- Gas Box Exhaust: 10 Stk GB Dual Exh FM4910 - Up\u003cbr\u003e- Manometer: Quad Mano 10Stk GB 0-1000 Pa\u003cbr\u003e- Gas Stick Slot 1: HP Ar\/N2 CGA 580\u003cbr\u003e- Gas Stick Slot 2: PraxAir Boron VCR 1\/4\u003cbr\u003e- Gas Stick Slot 3: PraxAir Arsine\u003cbr\u003e- Gas Stick Slot 4: PraxAir Phosphine\u003cbr\u003e- NSR - Gas Stick Slot 5: Praxair CO\u003cbr\u003e- Gas Stick Slot 6: PraxAir GeF4\u003cbr\u003e- NSR - Gas Stick Slot 7: Praxair Boron VCR 1\/4\u003cbr\u003e- Gas Stick Slot 8: XeH2\u003cbr\u003e- Gas Stick Slot 9: HP N2 CGA 580\u003cbr\u003e- Purge Assembly Slot 7 \u0026amp; 10: N2 w\/Ext Fd - 10 Stick\u003cbr\u003e- SS gaskets for all gas sticks: 10 stick gas box\u003cbr\u003e- Argon External Purge Assembly: Ar Ext Purge w\/Reg (Pos1)-Std","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45360115450046,"sku":"139318","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/2_472dcccb-9444-416c-9d34-70adee0aebf5.jpg?v=1756911025","url":"https:\/\/www.bridgetronic.com\/products\/139318","provider":"Bridge Tronic Global","version":"1.0","type":"link"}